TiN coated aluminum electrodes for DC high voltage electron guns

Preparing electrodes made of metals like stainless steel, for use inside DC high voltage electron guns, is a labor-intensive and time-consuming process. In this paper, the authors report the exceptional high voltage performance of aluminum electrodes coated with hard titanium nitride (TiN). The alum...

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Bibliographic Details
Published in:Journal of vacuum science & technology. A, Vacuum, surfaces, and films Vacuum, surfaces, and films, 2015-05, Vol.33 (3)
Main Authors: Mamun, Md Abdullah A., Elmustafa, Abdelmageed A., Taus, Rhys, Forman, Eric, Poelker, Matthew
Format: Article
Language:English
Subjects:
aluminum
anodes
cathodes
field emission
hardness
PARTICLE ACCELERATORS
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Summary:Preparing electrodes made of metals like stainless steel, for use inside DC high voltage electron guns, is a labor-intensive and time-consuming process. In this paper, the authors report the exceptional high voltage performance of aluminum electrodes coated with hard titanium nitride (TiN). The aluminum electrodes were comparatively easy to manufacture and required only hours of mechanical polishing using silicon carbide paper, prior to coating with TiN by a commercial vendor. The high voltage performance of three TiN-coated aluminum electrodes, before and after gas conditioning with helium, was compared to that of bare aluminum electrodes, and electrodes manufactured from titanium alloy (Ti-6Al-4V). Following gas conditioning, each TiN-coated aluminum electrode reached −225 kV bias voltage while generating less than 100 pA of field emission (
ISSN:0734-2101
1520-8559
DOI:10.1116/1.4916574