Scanning electron microscope measurement of width and shape of 10 nm patterned lines using a JMONSEL-modeled library

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Bibliographic Details
Published in:Ultramicroscopy 2015-07, Vol.154 (C), p.15-28
Main Authors: Villarrubia, J.S., Vladár, A.E., Ming, B., Kline, R.J., Sunday, D.F., Chawla, J.S., List, S.
Format: Article
Language:English
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ISSN:0304-3991
1879-2723
DOI:10.1016/j.ultramic.2015.01.004