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Fabrication of Thin Films of α-Fe 2 O 3 via Atomic Layer Deposition Using Iron Bisamidinate and Water under Mild Growth Conditions

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Bibliographic Details
Published in:ACS applied materials & interfaces 2015-08, Vol.7 (30), p.16138-16142
Main Authors: Avila, Jason R., Kim, Dong Wook, Rimoldi, Martino, Farha, Omar K., Hupp, Joseph T.
Format: Article
Language:English
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ISSN:1944-8244
1944-8252
DOI:10.1021/acsami.5b04043