Scanning Probe Nanopatterning and Layer‐by‐Layer Thinning of Black Phosphorus

Nanopatterning and layer‐by‐layer thinning of black phosphorus is demonstrated with conductive atomic‐force‐microscope anodic oxidation. The liquid‐phase patterning byproduct is readily removed by water rinsing. An alternating‐current bias enables direct nanopatterning and thinning on insulating sub...

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Bibliographic Details
Published in:Advanced materials (Weinheim) 2017-01, Vol.29 (1), p.np-n/a
Main Authors: Liu, Xiaolong, Chen, Kan‐Sheng, Wells, Spencer A., Balla, Itamar, Zhu, Jian, Wood, Joshua D., Hersam, Mark C.
Format: Article
Language:English
Subjects:
Anodizing
Atomic force microscopy
Byproducts
catalysis (homogeneous), catalysis (heterogeneous), solar (photovoltaic), solar (fuels), photosynthesis (natural and artificial), bio-inspired, hydrogen and fuel cells, electrodes - solar, defects, charge transport, spin dynamics, membrane, materials and chemistry by design, optics, synthesis (novel materials), synthesis (self-assembly)
Channels
conductive atomic force microscopy
Current modulation
Field effect transistors
Materials science
nanolithography
Nanostructure
Oxidation
phosphorene
Phosphorus
phosphorus oxide
Rinsing
Scanning
Semiconductor devices
Silicon dioxide
Silicon substrates
Thinning
transistors
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Summary:Nanopatterning and layer‐by‐layer thinning of black phosphorus is demonstrated with conductive atomic‐force‐microscope anodic oxidation. The liquid‐phase patterning byproduct is readily removed by water rinsing. An alternating‐current bias enables direct nanopatterning and thinning on insulating substrates such as SiO2/Si. Field‐effect transistors with patterned channels show significant improvements in current modulation by up to a factor of 50.
ISSN:0935-9648
1521-4095
DOI:10.1002/adma.201604121