Growth and nanomechanical characterization of nanoscale 3D architectures grown via focused electron beam induced deposition

Nanomechanical measurements of platinum-carbon 3D nanoscale architectures grown via focused electron beam induced deposition (FEBID) were performed using a nanoindentation system in a scanning electron microscope (SEM) for simultaneous in situ imaging. Compression tests were used to estimate the mod...

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Bibliographic Details
Published in:Nanoscale 2017-11, Vol.9 (42), p.16349-16356
Main Authors: Lewis, Brett B, Mound, Brittnee A, Srijanto, Bernadeta, Fowlkes, Jason D, Pharr, George M, Rack, Philip D
Format: Article
Language:English
Subjects:
NANOSCIENCE AND NANOTECHNOLOGY
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Summary:Nanomechanical measurements of platinum-carbon 3D nanoscale architectures grown via focused electron beam induced deposition (FEBID) were performed using a nanoindentation system in a scanning electron microscope (SEM) for simultaneous in situ imaging. Compression tests were used to estimate the modulus of the platinum-carbon deposits to be in the range of 8.6-10.5 GPa. Cantilever arm bend tests resulted in a modulus estimation of 15.6 GPa. Atomic layer deposition was used to conformally coat FEBID structures with a thin film of Al O , which strengthened the structures and increased the measured modulus. Cycled load-displacement testing at various load rates of nano-truss structures was also performed, demonstrating a viscoelastic response in the FEBID material. Finally, load-displacement tests of a variety of 3-dimensional nanoarchitectures with and without Al O coatings were measured.
ISSN:2040-3364
2040-3372
DOI:10.1039/c7nr05274j