Vacuum-Assisted ex situ Lift Out for Plan View FIB Specimen Preparation

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Bibliographic Details
Main Authors: Lowery, Lisa Marie, Giannuzzi, Lucille Ann, Lu, Ping, Kotula, Paul G., Michael, Joseph R.
Format: Conference Proceeding
Language:English
Online Access:Get full text
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ISSN:1431-9276
1435-8115
DOI:10.1017/S1431927618004658