Schottky Barrier Catalysis Mechanism in Metal-Assisted Chemical Etching of Silicon

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Bibliographic Details
Published in:ACS applied materials & interfaces 2016-03, Vol.8 (14)
Main Authors: Lai, Ruby A., Hymel, Thomas M., Narasimhan, Vijay K., Cui, Yi
Format: Article
Language:English
Subjects:
anisotropic etching
dopant etch stop
kinetic rate exponents
MATERIALS SCIENCE
metal-assisted chemical etching
nanoporous catalyst
reaction mechanism
Online Access:Get full text
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ISSN:1944-8244
1944-8252