Schottky Barrier Catalysis Mechanism in Metal-Assisted Chemical Etching of Silicon

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Published in:ACS applied materials & interfaces 2016-03, Vol.8 (14)
Main Authors: Lai, Ruby A., Hymel, Thomas M., Narasimhan, Vijay K., Cui, Yi
Format: Article
Language:English
Subjects:
anisotropic etching
dopant etch stop
kinetic rate exponents
MATERIALS SCIENCE
metal-assisted chemical etching
nanoporous catalyst
reaction mechanism
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container_issue 14
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container_title ACS applied materials & interfaces
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creator Lai, Ruby A.
Hymel, Thomas M.
Narasimhan, Vijay K.
Cui, Yi
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source American Chemical Society:Jisc Collections:American Chemical Society Read & Publish Agreement 2022-2024 (Reading list)
subjects anisotropic etching
dopant etch stop
kinetic rate exponents
MATERIALS SCIENCE
metal-assisted chemical etching
nanoporous catalyst
reaction mechanism
title Schottky Barrier Catalysis Mechanism in Metal-Assisted Chemical Etching of Silicon
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