Al 0.68 Sc 0.32 N Lamb wave resonators with electromechanical coupling coefficients near 10.28

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Bibliographic Details
Published in:Applied physics letters 2021-04, Vol.118 (17)
Main Authors: Esteves, Giovanni, Young, Travis R., Tang, Zichen, Yen, Sean, Bauer, Todd M., Henry, Michael D., Olsson, III, Roy H.
Format: Article
Language:English
Online Access:Get full text
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ISSN:0003-6951
1077-3118