Particle-in-cell simulations and passive bulk model of collisional capacitive discharge

Intermediate pressure (0.2–6.0 Torr), radio frequency capacitive discharges are of increasing importance in the thin film processing industry. However, existing low pressure (

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Bibliographic Details
Published in:Journal of vacuum science & technology. A, Vacuum, surfaces, and films Vacuum, surfaces, and films, 2020-01, Vol.38 (2)
Main Authors: Kawamura, Emi, Lieberman, Michael A., Lichtenberg, Allan J., Chabert, Pascal
Format: Article
Language:English
Subjects:
Electron energy distribution functions
MATERIALS SCIENCE
Particle-in-cell method
Physics
Plasma properties and parameters
Plasma sheaths
Thin films
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Summary:Intermediate pressure (0.2–6.0 Torr), radio frequency capacitive discharges are of increasing importance in the thin film processing industry. However, existing low pressure (
ISSN:0734-2101
1520-8559