Kinetic mechanism of conformal magnesium silicide (Mg2Si) film formation via reaction of Si single crystals with Mg vapor

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Bibliographic Details
Published in:Journal of materials science 2019-10, Vol.55 (3)
Main Authors: Li, Jiaqi, Hwang, SungHwan, Itskos, Grigorios, Sandhage, Kenneth H.
Format: Article
Language:English
Subjects:
Materials Science
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Summary:Not provided.
ISSN:0022-2461
1573-4803