Hyperspectral X-Ray Imaging: Progress Towards Chemical Analysis in the SEM

• Published in: IEEE transactions on applied superconductivity 2021-08, Vol.31 (5), p.1-6
• Main Authors: Carpenter, Matthew H., Stein, Benjamin, Koehler, Katrina E., Fontes, Christopher J., Smith, Chandler M., Wagner, Gregory L., Baker, Zachary K., Handley, Matthew L., Rabin, Michael W., Yang, Ping, Batista, Enrique R., McNeel, Daniel G., Schreiber, Katherine A., Bowes, Eric G., Ullom, Joel N., O'Neil, Galen C., Reintsema, Carl D., Bennett, Douglas A., Hilton, Gene C., Swetz, Daniel S., Schmidt, Daniel R., Mates, John A. B., Becker, Daniel T., Weber, Joel C., Gard, Johnathon D., Morgan, Kelsey M., Imrek, Jozsef, Yan, Daikang, Wessels, Abigail L., Croce, Mark
• Format: Article
• Language: English
• Subjects: Chemical analysis; Chemicals; Commissioning; CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; Design engineering; Detectors; Dilution; EDS; Electron Microscopy; Energy resolution; Energy-Dispersive Spectroscopy; Gold; Multiplexing; NIST; Non-Destructive Analysis; Nuclear Safeguards; Nuclear safety; Pixels; Prototypes; Scanning Electron Microscope; Scanning electron microscopy; SEM; Sensor arrays; TES; Transition Edge Sensor; X ray detectors; X ray imagery; X-ray Spectroscopy
• ISSN: 1051-8223; 1558-2515
• DOI: 10.1109/TASC.2021.3075087

The Hyperspectral X-ray Imaging (HXI) project will enable non-destructive chemical-state determination of nano-scale samples in the electron microscope for nuclear safeguards applications. To efficiently measure chemical state through electron-excited X-ray emission requires a combination of wide spectral bandwidth, high resolution, and high count rate capability. We are building a next-generation X-ray detector based on an array of transition edge sensors (TESs) to make these measurements possible and routine in the scanning electron microscope (SEM). Leveraging the large pixel densities afforded by microwave multiplexing readout and continuous, uninterrupted operation of a cryogen-free dilution refrigerator, this instrument will have efficiency to allow chemical species identification of nano-scale samples in hours instead of days to weeks. We describe prototype pixel designs for this HXI instrument, comprising three pixel types that will make up the hybrid TES array. Engineering design of the integrated HXI cryostat and SEM system is in progress, with full detector commissioning expected in Spring 2021 followed closely by full-scale integration with the SEM. We also report on the commissioning of a complementary TES-based X-ray emission spectroscopy platform for bulk samples to build a spectral library for HXI sample identification.