Evaluation of the accuracy of stopping and range of ions in matter simulations through secondary ion mass spectrometry and Rutherford backscattering spectrometry for low energy heavy ion implantation

The freely available “Stopping and Range of Ions in Matter” (SRIM) code is used for evaluating ion beam ranges and depth profiles. We present secondary ion mass spectrometry and Rutherford backscattering experimental results of Si samples implanted with low energy Sb ions to evaluate the accuracy of...

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Published in:Journal of vacuum science & technology. A, Vacuum, surfaces, and films Vacuum, surfaces, and films, 2021-08, Vol.39 (6)
Main Authors: Titze, Michael, Pacheco, Jose L., Byers, Todd, Van Deusen, Stuart B., Perry, Daniel L., Weathers, Duncan, Bielejec, Edward S.
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Language:English
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CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS
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container_title Journal of vacuum science & technology. A, Vacuum, surfaces, and films
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creator Titze, Michael
Pacheco, Jose L.
Byers, Todd
Van Deusen, Stuart B.
Perry, Daniel L.
Weathers, Duncan
Bielejec, Edward S.
description The freely available “Stopping and Range of Ions in Matter” (SRIM) code is used for evaluating ion beam ranges and depth profiles. We present secondary ion mass spectrometry and Rutherford backscattering experimental results of Si samples implanted with low energy Sb ions to evaluate the accuracy of SRIM simulations. We show that the SRIM simulation systematically overestimates the range by 2–6 nm and this overestimation increases for larger ion implantation energy. For the lowest energy implantation investigated, here we find up to a 25% error between the SRIM simulation and the measured range. Finally, the ion straggle shows excellent agreement between simulation and experimental results.
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fullrecord <record><control><sourceid>osti</sourceid><recordid>TN_cdi_osti_scitechconnect_1830531</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>1830531</sourcerecordid><originalsourceid>FETCH-osti_scitechconnect_18305313</originalsourceid><addsrcrecordid>eNqNjs1KxTAQhYMoWH_eYXBfSFqr17VccS3uL2M6baNpUjLJlT6hr2VS3bhzNZzDx3fmRFSqa2S967qHU1HJ-_a2bpRU5-KC-V1K2TTyrhJf-yPahNF4B36AOBGg1imgXkvm6JfFuBHQ9RDQjVTaDDMYBzPGSAHYzMluCs6C4NM4AZP2rsewFjiDzMAL6Rj8TDG3xfeS8lwYfOjhDfUH601X1v6gGQDrP4EchXGFifD4YzXzYtHFbflKnA1oma5_76W4edq_Pj7XnqM5sDaR9JRfcll8ULtWdq1q_wV9A1yRbp0</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype></control><display><type>article</type><title>Evaluation of the accuracy of stopping and range of ions in matter simulations through secondary ion mass spectrometry and Rutherford backscattering spectrometry for low energy heavy ion implantation</title><source>American Institute of Physics:Jisc Collections:Transitional Journals Agreement 2021-23 (Reading list)</source><creator>Titze, Michael ; Pacheco, Jose L. ; Byers, Todd ; Van Deusen, Stuart B. ; Perry, Daniel L. ; Weathers, Duncan ; Bielejec, Edward S.</creator><creatorcontrib>Titze, Michael ; Pacheco, Jose L. ; Byers, Todd ; Van Deusen, Stuart B. ; Perry, Daniel L. ; Weathers, Duncan ; Bielejec, Edward S. ; Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)</creatorcontrib><description>The freely available “Stopping and Range of Ions in Matter” (SRIM) code is used for evaluating ion beam ranges and depth profiles. We present secondary ion mass spectrometry and Rutherford backscattering experimental results of Si samples implanted with low energy Sb ions to evaluate the accuracy of SRIM simulations. We show that the SRIM simulation systematically overestimates the range by 2–6 nm and this overestimation increases for larger ion implantation energy. For the lowest energy implantation investigated, here we find up to a 25% error between the SRIM simulation and the measured range. Finally, the ion straggle shows excellent agreement between simulation and experimental results.</description><identifier>ISSN: 0734-2101</identifier><identifier>EISSN: 1520-8559</identifier><language>eng</language><publisher>United States: American Vacuum Society / AIP</publisher><subject>CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS</subject><ispartof>Journal of vacuum science &amp; technology. A, Vacuum, surfaces, and films, 2021-08, Vol.39 (6)</ispartof><lds50>peer_reviewed</lds50><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed><orcidid>0000000347014453 ; 0000000307049264</orcidid></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><link.rule.ids>230,314,780,784,885</link.rule.ids><backlink>$$Uhttps://www.osti.gov/servlets/purl/1830531$$D View this record in Osti.gov$$Hfree_for_read</backlink></links><search><creatorcontrib>Titze, Michael</creatorcontrib><creatorcontrib>Pacheco, Jose L.</creatorcontrib><creatorcontrib>Byers, Todd</creatorcontrib><creatorcontrib>Van Deusen, Stuart B.</creatorcontrib><creatorcontrib>Perry, Daniel L.</creatorcontrib><creatorcontrib>Weathers, Duncan</creatorcontrib><creatorcontrib>Bielejec, Edward S.</creatorcontrib><creatorcontrib>Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)</creatorcontrib><title>Evaluation of the accuracy of stopping and range of ions in matter simulations through secondary ion mass spectrometry and Rutherford backscattering spectrometry for low energy heavy ion implantation</title><title>Journal of vacuum science &amp; technology. A, Vacuum, surfaces, and films</title><description>The freely available “Stopping and Range of Ions in Matter” (SRIM) code is used for evaluating ion beam ranges and depth profiles. We present secondary ion mass spectrometry and Rutherford backscattering experimental results of Si samples implanted with low energy Sb ions to evaluate the accuracy of SRIM simulations. We show that the SRIM simulation systematically overestimates the range by 2–6 nm and this overestimation increases for larger ion implantation energy. For the lowest energy implantation investigated, here we find up to a 25% error between the SRIM simulation and the measured range. Finally, the ion straggle shows excellent agreement between simulation and experimental results.</description><subject>CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS</subject><issn>0734-2101</issn><issn>1520-8559</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2021</creationdate><recordtype>article</recordtype><recordid>eNqNjs1KxTAQhYMoWH_eYXBfSFqr17VccS3uL2M6baNpUjLJlT6hr2VS3bhzNZzDx3fmRFSqa2S967qHU1HJ-_a2bpRU5-KC-V1K2TTyrhJf-yPahNF4B36AOBGg1imgXkvm6JfFuBHQ9RDQjVTaDDMYBzPGSAHYzMluCs6C4NM4AZP2rsewFjiDzMAL6Rj8TDG3xfeS8lwYfOjhDfUH601X1v6gGQDrP4EchXGFifD4YzXzYtHFbflKnA1oma5_76W4edq_Pj7XnqM5sDaR9JRfcll8ULtWdq1q_wV9A1yRbp0</recordid><startdate>20210830</startdate><enddate>20210830</enddate><creator>Titze, Michael</creator><creator>Pacheco, Jose L.</creator><creator>Byers, Todd</creator><creator>Van Deusen, Stuart B.</creator><creator>Perry, Daniel L.</creator><creator>Weathers, Duncan</creator><creator>Bielejec, Edward S.</creator><general>American Vacuum Society / AIP</general><scope>OIOZB</scope><scope>OTOTI</scope><orcidid>https://orcid.org/0000000347014453</orcidid><orcidid>https://orcid.org/0000000307049264</orcidid></search><sort><creationdate>20210830</creationdate><title>Evaluation of the accuracy of stopping and range of ions in matter simulations through secondary ion mass spectrometry and Rutherford backscattering spectrometry for low energy heavy ion implantation</title><author>Titze, Michael ; Pacheco, Jose L. ; Byers, Todd ; Van Deusen, Stuart B. ; Perry, Daniel L. ; Weathers, Duncan ; Bielejec, Edward S.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-osti_scitechconnect_18305313</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2021</creationdate><topic>CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Titze, Michael</creatorcontrib><creatorcontrib>Pacheco, Jose L.</creatorcontrib><creatorcontrib>Byers, Todd</creatorcontrib><creatorcontrib>Van Deusen, Stuart B.</creatorcontrib><creatorcontrib>Perry, Daniel L.</creatorcontrib><creatorcontrib>Weathers, Duncan</creatorcontrib><creatorcontrib>Bielejec, Edward S.</creatorcontrib><creatorcontrib>Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)</creatorcontrib><collection>OSTI.GOV - Hybrid</collection><collection>OSTI.GOV</collection><jtitle>Journal of vacuum science &amp; technology. A, Vacuum, surfaces, and films</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Titze, Michael</au><au>Pacheco, Jose L.</au><au>Byers, Todd</au><au>Van Deusen, Stuart B.</au><au>Perry, Daniel L.</au><au>Weathers, Duncan</au><au>Bielejec, Edward S.</au><aucorp>Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)</aucorp><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Evaluation of the accuracy of stopping and range of ions in matter simulations through secondary ion mass spectrometry and Rutherford backscattering spectrometry for low energy heavy ion implantation</atitle><jtitle>Journal of vacuum science &amp; technology. A, Vacuum, surfaces, and films</jtitle><date>2021-08-30</date><risdate>2021</risdate><volume>39</volume><issue>6</issue><issn>0734-2101</issn><eissn>1520-8559</eissn><abstract>The freely available “Stopping and Range of Ions in Matter” (SRIM) code is used for evaluating ion beam ranges and depth profiles. We present secondary ion mass spectrometry and Rutherford backscattering experimental results of Si samples implanted with low energy Sb ions to evaluate the accuracy of SRIM simulations. We show that the SRIM simulation systematically overestimates the range by 2–6 nm and this overestimation increases for larger ion implantation energy. For the lowest energy implantation investigated, here we find up to a 25% error between the SRIM simulation and the measured range. Finally, the ion straggle shows excellent agreement between simulation and experimental results.</abstract><cop>United States</cop><pub>American Vacuum Society / AIP</pub><orcidid>https://orcid.org/0000000347014453</orcidid><orcidid>https://orcid.org/0000000307049264</orcidid><oa>free_for_read</oa></addata></record>
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subjects CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS
title Evaluation of the accuracy of stopping and range of ions in matter simulations through secondary ion mass spectrometry and Rutherford backscattering spectrometry for low energy heavy ion implantation
url http://sfxeu10.hosted.exlibrisgroup.com/loughborough?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-06T17%3A06%3A27IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-osti&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=Evaluation%20of%20the%20accuracy%20of%20stopping%20and%20range%20of%20ions%20in%20matter%20simulations%20through%20secondary%20ion%20mass%20spectrometry%20and%20Rutherford%20backscattering%20spectrometry%20for%20low%20energy%20heavy%20ion%20implantation&rft.jtitle=Journal%20of%20vacuum%20science%20&%20technology.%20A,%20Vacuum,%20surfaces,%20and%20films&rft.au=Titze,%20Michael&rft.aucorp=Sandia%20National%20Lab.%20(SNL-NM),%20Albuquerque,%20NM%20(United%20States)&rft.date=2021-08-30&rft.volume=39&rft.issue=6&rft.issn=0734-2101&rft.eissn=1520-8559&rft_id=info:doi/&rft_dat=%3Costi%3E1830531%3C/osti%3E%3Cgrp_id%3Ecdi_FETCH-osti_scitechconnect_18305313%3C/grp_id%3E%3Coa%3E%3C/oa%3E%3Curl%3E%3C/url%3E&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true