Nanoscale Structural and Chemical Properties of Ferroelectric Aluminum Scandium Nitride Thin Films

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Bibliographic Details
Published in:Journal of physical chemistry. C 2021-06, Vol.125 (26)
Main Authors: Musavigharavi, Pariasadat, Meng, Andrew C., Wang, Dixiong, Zheng, Jeffery, Foucher, Alexandre C., Olsson, III, Roy H., Stach, Eric A.
Format: Article
Language:English
Online Access:Get full text
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ISSN:1932-7447
1932-7455