Nanoscale Structural and Chemical Properties of Ferroelectric Aluminum Scandium Nitride Thin Films

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Published in:Journal of physical chemistry. C 2021-06, Vol.125 (26)
Main Authors: Musavigharavi, Pariasadat, Meng, Andrew C., Wang, Dixiong, Zheng, Jeffery, Foucher, Alexandre C., Olsson, III, Roy H., Stach, Eric A.
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container_issue 26
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container_title Journal of physical chemistry. C
container_volume 125
creator Musavigharavi, Pariasadat
Meng, Andrew C.
Wang, Dixiong
Zheng, Jeffery
Foucher, Alexandre C.
Olsson, III, Roy H.
Stach, Eric A.
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title Nanoscale Structural and Chemical Properties of Ferroelectric Aluminum Scandium Nitride Thin Films
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