All-epitaxial resonant cavity enhanced long-wave infrared detectors for focal plane arrays

We demonstrate a monolithic all-epitaxial resonant-cavity architecture for long-wave infrared photodetectors with substrate-side illumination. An nBn detector with an ultra-thin ( t ≈ 350   nm) absorber layer is integrated into a leaky resonant cavity, formed using semi-transparent highly doped ( n...

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Bibliographic Details
Published in:Applied physics letters 2023-01, Vol.122 (2)
Main Authors: Petluru, P., Muhowski, A. J., Kamboj, A., Mansfield, N. C., Bergthold, M., Shaner, E. A., Klem, J. F., Wasserman, D.
Format: Article
Language:English
Subjects:
Applied physics
Epitaxial layers
Epitaxy
Focal plane devices
Infrared detectors
Quantum efficiency
Standing waves
Substrates
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Summary:We demonstrate a monolithic all-epitaxial resonant-cavity architecture for long-wave infrared photodetectors with substrate-side illumination. An nBn detector with an ultra-thin ( t ≈ 350   nm) absorber layer is integrated into a leaky resonant cavity, formed using semi-transparent highly doped ( n + +) epitaxial layers, and aligned to the anti-node of the cavity's standing wave. The devices are characterized electrically and optically and demonstrate an external quantum efficiency of ∼25% at T = 180   K in an architecture compatible with focal plane array configurations.
ISSN:0003-6951
1077-3118
DOI:10.1063/5.0131628