Two-dimensional van der Waals thin film transistors as active matrix for spatially resolved pressure sensing

The development of pressure sensor arrays capable of distinguishing the shape and texture details of objects is of considerable interest in the emerging fields of smart robots, prostheses, human-machine interfaces, and artificial intelligence (AI). Here we report an integrated pressure sensor array,...

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Bibliographic Details
Published in:Nano research 2021-10, Vol.14 (10), p.3395-3401
Main Authors: Ma, Chao, Xu, Dong, Wang, Peiqi, Lin, Zhaoyang, Zhou, Jingyuan, Jia, Chuancheng, Huang, Jin, Li, Shengtao, Huang, Yu, Duan, Xiangfeng
Format: Article
Language:English
Subjects:
Active control
Arrays
Artificial intelligence
Atomic/Molecular Structure and Spectra
Biomedicine
Biotechnology
Carbon nanotubes
Chemistry
Chemistry and Materials Science
Condensed Matter Physics
Electrodes
Interfaces
Man-machine interfaces
Mapping
Materials Science
Molybdenum disulfide
Nanotechnology
Optoelectronic devices
Physics
Polydimethylsiloxane
Power consumption
Pressure
Pressure sensors
Prostheses
Prosthetics
Research Article
Science & Technology - Other Topics
Semiconductor devices
Sensor arrays
Sensors
Thin film transistors
Thin films
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Summary:The development of pressure sensor arrays capable of distinguishing the shape and texture details of objects is of considerable interest in the emerging fields of smart robots, prostheses, human-machine interfaces, and artificial intelligence (AI). Here we report an integrated pressure sensor array, by combining solution-processed two-dimensional (2D) MoS 2 van der Waals (vdW) thin film transistor (TFT) active matrix and conductive micropyramidal pressure-sensitive rubber (PSR) electrodes made of polydimethylsiloxane/carbon nanotube composites, to achieve spatially revolved pressure mapping with excellent contrast and low power consumption. We demonstrate a 10 × 10 active matrix by using the 2D MoS 2 vdW-TFTs with high on-off ratio > 10 6 , minimal hysteresis, and excellent device-to-device uniformity. The combination of the vdW-TFT active matrix with the highly uniform micropyramidal PSR electrodes creates an integrated pressure sensing array for spatially resolved pressure mapping. This study demonstrates that the solution-processed 2D vdW-TFTs offer a solution for active-matrix control of pressure sensor arrays, and could be extended for other active-matrix arrays of electronic or optoelectronic devices.
ISSN:1998-0124
1998-0000
DOI:10.1007/s12274-021-3717-0