Sensitive detection of nanomechanical motion using piezoresistive signal downmixing

We have developed a method of measuring rf-range resonance properties of nanoelectromechanical systems (NEMS) with integrated piezoresistive strain detectors serving as signal downmixers. The technique takes advantage of the high strain sensitivity of semiconductor-based piezoresistors, while overco...

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Bibliographic Details
Published in:Applied physics letters 2005-03, Vol.86 (13)
Main Authors: Bargatin, I., Myers, E. B., Arlett, J., Gudlewski, B., Roukes, M. L.
Format: Article
Language:English
Subjects:
ACTUATORS
ATTENUATION
DETECTION
IMPEDANCE
INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY
MHZ RANGE 01-100
NANOSTRUCTURES
RESONANCE
SEMICONDUCTOR MATERIALS
SENSITIVITY
SIGNALS
STRAINS
TEMPERATURE RANGE 0273-0400 K
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Summary:We have developed a method of measuring rf-range resonance properties of nanoelectromechanical systems (NEMS) with integrated piezoresistive strain detectors serving as signal downmixers. The technique takes advantage of the high strain sensitivity of semiconductor-based piezoresistors, while overcoming the problem of rf signal attenuation due to a high source impedance. Our technique also greatly reduces the effect of the cross-talk between the detector and actuator circuits. We achieve thermomechanical noise detection of cantilever resonance modes up to 71MHz at room temperature, demonstrating that downmixed piezoresistive signal detection is a viable high-sensitivity method of displacement detection in high-frequency NEMS.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.1896103