A differential mechanical profilometer for thickness measurement

A low cost differential profilometer based on standard commercial displacement transducers is fully described. Unlike most common profilometers this device can be used to measure the thickness profile of samples having both surfaces irregular. A sensitivity of about 0.2 μ m , independent of the samp...

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Bibliographic Details
Published in:Review of scientific instruments 2004-12, Vol.75 (12), p.5362-5363
Main Authors: Alves, J. Maia, Brito, M. C., Serra, J. M., Vallêra, A. M.
Format: Article
Language:English
Subjects:
INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY
SEMICONDUCTOR MATERIALS
SENSITIVITY
SILICON
THICKNESS
TRANSDUCERS
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Description
Summary:A low cost differential profilometer based on standard commercial displacement transducers is fully described. Unlike most common profilometers this device can be used to measure the thickness profile of samples having both surfaces irregular. A sensitivity of about 0.2 μ m , independent of the sample thickness is achieved.
ISSN:0034-6748
1089-7623
DOI:10.1063/1.1821627