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The ESRF BM05 Metrology Beamline: Instrumentation And Performance Upgrade

The BM05 synchrotron X-ray beamline has been designed to serve as a test and development station. Recently, new instrumentation has been installed to extend its metrology capability. A monochromatic beam can be produced over an energy range spanning from 6 keV to 100 keV using two Bragg Si(111) flat...

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Bibliographic Details
Main Authors: Ziegler, E, Hoszowska, J, Bigault, T, Peverini, L, Massonnat, J Y, Hustache, R
Format: Conference Proceeding
Language:English
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Summary:The BM05 synchrotron X-ray beamline has been designed to serve as a test and development station. Recently, new instrumentation has been installed to extend its metrology capability. A monochromatic beam can be produced over an energy range spanning from 6 keV to 100 keV using two Bragg Si(111) flat-crystal monochromators. It is also possible to install a sagittal crystal (6 keV < E < 30 keV) to concentrate the beam horizontally to 300 mum, therefore increasing the photon density by ~ 2 orders of magnitude. Alternatively, the beam can be concentrated into micrometer or even sub-micrometer dimensions by placing a Kirkpatrick-Baez system very close to the sample under study. A double multilayer monochromator mounted in series with the crystal monochromator(s) can retain a fixed-exit beam and reduce the amount of harmonics by at least 4 orders of magnitude. When used alone, the multilayer monochromator delivers a high-flux low-resolution beam. A first set of (Ru/B4C)70 multilayers has been made with a relatively large d-spacing (4 nm) to match the quality of the mirror substrates and to preserve the coherence properties of the synchrotron source. Ultimately three different coatings will allow to cover the energy band between 6 keV and 30 keV and to vary the energy resolution (E/E) between 5.10-3 and 4.10-2. With two large experimental hutches capable of receiving either white of monochromatic beams and equipped with several diffractometers, optical tables, and detectors, this beamline offers a remarkable and unique flexibility.
ISSN:0094-243X
1551-7616
DOI:10.1063/1.1757827