Nucleation of diamond by pure carbon ion bombardment-a transmission electron microscopy study

A cross-sectional high-resolution transmission electron microscopy (HRTEM) study of a film deposited by a 1 keV mass-selected carbon ion beam onto silicon held at 800°C is presented. Initially, a graphitic film with its basal planes perpendicular to the substrate is evolving. The precipitation of na...

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Bibliographic Details
Published in:Applied physics letters 2005-08, Vol.87 (6), p.063103-063103-3
Main Authors: Yao, Y., Liao, M. Y., Wang, Z. G., Lifshitz, Y., Lee, S. T.
Format: Article
Language:English
Subjects:
CARBON IONS
DEPOSITION
DIAMONDS
ELECTRON DIFFRACTION
ION BEAMS
KEV RANGE 01-10
LAYERS
MATERIALS SCIENCE
NANOSTRUCTURES
NUCLEATION
PRECIPITATION
RESOLUTION
SILICON
SPECTRA
SPECTROSCOPY
SUBSTRATES
TEMPERATURE RANGE 1000-4000 K
THIN FILMS
TRANSMISSION ELECTRON MICROSCOPY
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Summary:A cross-sectional high-resolution transmission electron microscopy (HRTEM) study of a film deposited by a 1 keV mass-selected carbon ion beam onto silicon held at 800°C is presented. Initially, a graphitic film with its basal planes perpendicular to the substrate is evolving. The precipitation of nanodiamond crystallites in upper layers is confirmed by HRTEM, selected area electron diffraction, and electron energy loss spectroscopy. The nucleation of diamond on graphitic edges as predicted by Lambrecht [ W. R. L. Lambrecht , C. H. Lee , B. Segall , J. C. Angus , Z. Li , and M. Sunkara , Nature , 364 607 ( 1993 ) ] is experimentally confirmed. The results are discussed in terms of our recent subplantation-based diamond nucleation model.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.2007869