Read-out of micromechanical cantilever sensors by phase shifting interferometry

White light interferometry was applied to determine the bending of micromechanical cantilever sensors (MCS) with an error typically less than 1 per mille . Deflections smaller than 2 nm could be resolved at a lateral resolution of 2 μ m . Absolute values for curvatures can be determined and suitable...

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Bibliographic Details
Published in:Applied physics letters 2005-08, Vol.87 (6), p.064101-064101-3
Main Authors: Helm, M., Servant, J. J., Saurenbach, F., Berger, R.
Format: Article
Language:English
Subjects:
BENDING
CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS
ERRORS
INTERFEROMETRY
IRRADIATION
NONDESTRUCTIVE TESTING
PHASE SHIFT
PLASMA
POLYMERS
READOUT SYSTEMS
ULTRAVIOLET RADIATION
VISIBLE RADIATION
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Summary:White light interferometry was applied to determine the bending of micromechanical cantilever sensors (MCS) with an error typically less than 1 per mille . Deflections smaller than 2 nm could be resolved at a lateral resolution of 2 μ m . Absolute values for curvatures can be determined and suitable reference points can be chosen on the MCS support. This was demonstrated in experiments using plasma polymerized polyallylamine films, which cross link upon ultraviolet light irradiation. The results suggest that 100 μ m long segments are sufficient to estimate reliable curvature radii of 450 μ m long microcantilever sensors.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.2008358