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Soft magnetic granular material Co–Fe–Hf–O for micromagnetic device applications

A granular magnetic material, Co–Fe–Hf–O, has been developed-using dc pulsed magnetron reactive sputtering. The deposition rate is as high as 1.3nm∕s. The electrical and magnetic properties of Co–Fe–Hf–O film can be tuned by changing O2 during deposition. A highly resistive, magnetically soft film h...

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Published in:	Journal of applied physics 2005-05, Vol.97 (10)
Main Authors:	Li, Liangliang, Crawford, Ankur M., Wang, Shan X., Marshall, Ann F., Mao, Ming, Schneider, Thomas, Bubber, Randhir
Format:	Article
Language:	English
Subjects:	ANISOTROPY ARGON COBALT COMPOUNDS COERCIVE FORCE CRYSTAL STRUCTURE DEPOSITION ELECTRIC CONDUCTIVITY FERROMAGNETIC MATERIALS GAS FLOW GRANULAR MATERIALS HAFNIUM COMPOUNDS HYSTERESIS IRON COMPOUNDS MAGNETIC PROPERTIES MATERIALS SCIENCE MICROSTRUCTURE OXYGEN SPUTTERING THIN FILMS TRANSMISSION ELECTRON MICROSCOPY X-RAY DIFFRACTION
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creator	Li, Liangliang Crawford, Ankur M. Wang, Shan X. Marshall, Ann F. Mao, Ming Schneider, Thomas Bubber, Randhir
description	A granular magnetic material, Co–Fe–Hf–O, has been developed-using dc pulsed magnetron reactive sputtering. The deposition rate is as high as 1.3nm∕s. The electrical and magnetic properties of Co–Fe–Hf–O film can be tuned by changing O2 during deposition. A highly resistive, magnetically soft film has been achieved in a small range of the O2∕(Ar+O2) gas flow ratio. The origin of the dependence of magnetic and electrical properties of this material is studied and explained by monitoring the evolution of the film microstructure, using x-ray diffraction and transmission electron microscopy.
doi_str_mv	10.1063/1.1853238
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subjects	ANISOTROPY ARGON COBALT COMPOUNDS COERCIVE FORCE CRYSTAL STRUCTURE DEPOSITION ELECTRIC CONDUCTIVITY FERROMAGNETIC MATERIALS GAS FLOW GRANULAR MATERIALS HAFNIUM COMPOUNDS HYSTERESIS IRON COMPOUNDS MAGNETIC PROPERTIES MATERIALS SCIENCE MICROSTRUCTURE OXYGEN SPUTTERING THIN FILMS TRANSMISSION ELECTRON MICROSCOPY X-RAY DIFFRACTION
title	Soft magnetic granular material Co–Fe–Hf–O for micromagnetic device applications
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