2-D Temperature Mapping in Fluorocarbon Plasmas

Two-dimensional maps of rotational temperature in CF4 plasmas were determined using planar laser-induced fluorescence measurements of CF A2{sigma}+ - X2{pi} (1,0). Rotational temperatures are expected to be in equilibrium with gas temperatures under the present conditions. Experiments were performed...

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Bibliographic Details
Published in:AIP conference proceedings 2005-09, Vol.788 (1)
Main Authors: Steffens, Kristen L., Sobolewski, Mark A.
Format: Article
Language:English
Subjects:
70 PLASMA PHYSICS AND FUSION TECHNOLOGY
CARBON FLUORIDES
COOLING
DENSITY
ELECTRODES
ELECTRON TEMPERATURE
FLUORESCENCE
ION TEMPERATURE
LASERS
ORGANIC COMPOUNDS
PLASMA
PLASMA DIAGNOSTICS
REACTION KINETICS
RF SYSTEMS
TEMPERATURE GRADIENTS
TEMPERATURE MEASUREMENT
TEMPERATURE RANGE 0273-0400 K
TEMPERATURE RANGE 0400-1000 K
TWO-DIMENSIONAL CALCULATIONS
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Summary:Two-dimensional maps of rotational temperature in CF4 plasmas were determined using planar laser-induced fluorescence measurements of CF A2{sigma}+ - X2{pi} (1,0). Rotational temperatures are expected to be in equilibrium with gas temperatures under the present conditions. Experiments were performed in a capacitively-coupled, parallel-plate reactor at pressures from 27 Pa to 107 Pa and powers of 10 W to 30 W. The effects of electrode cooling and having a wafer present were also examined. Measured temperatures ranged between 273 K{+-}15 K and 480 K{+-}15 K. The strong temperature gradients found in these plasmas can have serious effects on density measurements that probe a single rotational level, as well as on reaction rate constants and interpretation of density gradients.
ISSN:0094-243X
1551-7616
DOI:10.1063/1.2062985