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In-line sensor for accurate rf power measurements

An in-line sensor has been constructed with 50 Ω characteristic impedance to accurately measure rf power dissipated in a matched or unmatched load with a view to being implemented as a rf discharge diagnostic. The physical construction and calibration technique are presented. The design is a wide ba...

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Bibliographic Details
Published in:Review of scientific instruments 2005-10, Vol.76 (10), p.106107-106107-3
Main Authors: Gahan, D., Hopkins, M. B.
Format: Article
Language:English
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Summary:An in-line sensor has been constructed with 50 Ω characteristic impedance to accurately measure rf power dissipated in a matched or unmatched load with a view to being implemented as a rf discharge diagnostic. The physical construction and calibration technique are presented. The design is a wide band, hybrid directional coupler/current-voltage sensor suitable for fundamental and harmonic power measurements. A comparison with a standard wattmeter using dummy load impedances shows that this in-line sensor is significantly more accurate in mismatched conditions.
ISSN:0034-6748
1089-7623
DOI:10.1063/1.2090287