Kinetic Model for Production and Growth of Dust Nanoparticles in Low Pressure Plasmas of RF Discharges

A theoretical model is presented to describe the production and the growth of clusters and dust nanoparticles in low-pressure plasmas. The important processes of losses by diffusion and collisions of electrons and ions with the clusters and grains have been taken in consideration. Formulas and equat...

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Bibliographic Details
Main Authors: Gordiets, B.F., Bertran, E.
Format: Conference Proceeding
Language:English
Subjects:
70 PLASMA PHYSICS AND FUSION TECHNOLOGY
DENSITY
DIFFUSION
DUSTS
ELECTRON COLLISIONS
ELECTRONS
HIGH-FREQUENCY DISCHARGES
ION COLLISIONS
IONS
NANOSTRUCTURES
PARTICLES
PLASMA
PLASMA PRESSURE
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Summary:A theoretical model is presented to describe the production and the growth of clusters and dust nanoparticles in low-pressure plasmas. The important processes of losses by diffusion and collisions of electrons and ions with the clusters and grains have been taken in consideration. Formulas and equations have been provided to calculate neutral and negative cluster densities according to the number 'n' of monomers in clusters; the cluster critical 'dimension' n*; which determine the rate for production of dust particles; the value of this rate; the density and average 'dimension' of these particles.
ISSN:0094-243X
1551-7616
DOI:10.1063/1.2134642