Quantitative WDS analysis using electron probe microanalyzer

In this paper, the procedure for conducting quantitative elemental analysis by ZAF correction method using wavelength dispersive X-ray spectroscopy (WDS) in an electron probe microanalyzer (EPMA) is elaborated. Analysis of a thermal barrier coating (TBC) system formed on a Ni-based single crystal su...

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Bibliographic Details
Published in:Materials characterization 2006-04, Vol.56 (3), p.192-199
Main Authors: Ul-Hamid, Anwar, Tawancy, Hani M., Mohammed, Abdul-Rashid I., Al-Jaroudi, Said S., Abbas, Nureddin M.
Format: Article
Language:English
Subjects:
Applied sciences
Cross-disciplinary physics: materials science
rheology
ELECTRON MICROPROBE ANALYSIS
ELECTRON PROBES
EPMA
Exact sciences and technology
MATERIALS SCIENCE
Metals. Metallurgy
MONOCRYSTALS
Nonmetallic coatings
Phase diagrams and microstructures developed by solidification and solid-solid phase transformations
Physics
Production techniques
Quantitative analysis
Solidification
Surface treatment
Thermal barrier coating
Wavelength dispersive X-ray spectroscopy
WAVELENGTHS
X-RAY SPECTROSCOPY
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Summary:In this paper, the procedure for conducting quantitative elemental analysis by ZAF correction method using wavelength dispersive X-ray spectroscopy (WDS) in an electron probe microanalyzer (EPMA) is elaborated. Analysis of a thermal barrier coating (TBC) system formed on a Ni-based single crystal superalloy is presented as an example to illustrate the analysis of samples consisting of a large number of major and minor elements. The analysis was performed by known standards and measured peak-to-background intensity ratios. The procedure for using separate set of acquisition conditions for major and minor element analysis is explained and its importance is stressed.
ISSN:1044-5803
1873-4189
DOI:10.1016/j.matchar.2005.11.007