Confocal operation of a transmission electron microscope with two aberration correctors

The authors demonstrate that confocal imaging trajectories can be established in a transmission electron microscope fitted with two spherical aberration correctors. An atomic-scale electron beam, focused by aberration-corrected illumination optics, is directly imaged by a second aberration-corrected...

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Bibliographic Details
Published in:Applied physics letters 2006-09, Vol.89 (12), p.124105-124105-3
Main Authors: Nellist, P. D., Behan, G., Kirkland, A. I., Hetherington, C. J. D.
Format: Article
Language:English
Subjects:
CHROMATIC ABERRATIONS
ELECTRON BEAMS
FOCUSING
GEOMETRICAL ABERRATIONS
MATERIALS SCIENCE
OPTICS
RESOLUTION
SCANNING ELECTRON MICROSCOPY
TRAJECTORIES
TRANSMISSION ELECTRON MICROSCOPY
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Summary:The authors demonstrate that confocal imaging trajectories can be established in a transmission electron microscope fitted with two spherical aberration correctors. An atomic-scale electron beam, focused by aberration-corrected illumination optics, is directly imaged by a second aberration-corrected system. The initial experiment described indicates how aberration-corrected scanning confocal electron microscopy will allow three-dimensional imaging and analysis of materials with atomic lateral resolution and with a depth resolution of a few nanometers. The depth resolution in the confocal mode is shown to be robust to the uncorrected chromatic aberration of the lenses, unlike depth sectioning using a single lens.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.2356699