Single crystal Fe films grown on Ge (001) substrates by magnetron sputtering

Single crystal Fe films were grown on Ge (001) substrates by using dc magnetron sputtering. It was found that the microstructures and magnetic properties of Fe films on Ge substrates were strongly dependent upon the substrate temperature during the deposition process. There existed a narrow substrat...

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Bibliographic Details
Published in:Applied physics letters 2006-09, Vol.89 (11)
Main Authors: Lou, J., Daigle, A., Chen, L., Wu, Y. Q., Harris, V. G., Vittoria, C., Sun, N. X.
Format: Article
Language:English
Subjects:
AMORPHOUS STATE
DEPOSITION
FERROMAGNETIC MATERIALS
GERMANIUM ALLOYS
HYSTERESIS
IRON
IRON ALLOYS
MAGNETIC PROPERTIES
MATERIALS SCIENCE
MICROSTRUCTURE
MONOCRYSTALS
POLYCRYSTALS
SPUTTERING
SUBSTRATES
TEMPERATURE DEPENDENCE
TEMPERATURE RANGE 0273-0400 K
TEMPERATURE RANGE 0400-1000 K
THIN FILMS
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Summary:Single crystal Fe films were grown on Ge (001) substrates by using dc magnetron sputtering. It was found that the microstructures and magnetic properties of Fe films on Ge substrates were strongly dependent upon the substrate temperature during the deposition process. There existed a narrow substrate temperature window of 125±25°C for achieving single crystal Fe film on Ge. Lower substrate temperature led to polycrystalline Fe films due to limited mobility of Fe atoms, while higher substrate temperatures resulted in amorphous Fe–Ge alloy due to severe interdiffusion.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.2339041