Estimation of optimum density and temperature for maximum efficiency of tin ions in Z discharge extreme ultraviolet sources

Extreme ultraviolet (EUV) discharge-based lamps for EUV lithography need to generate extremely high power in the narrow spectrum band of 13.5±0.135 nm. A simplified collisional-radiative model and radiative transfer solution for an isotropic medium were utilized to investigate the wavelength-integra...

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Published in:Journal of applied physics 2007-02, Vol.101 (3)
Main Authors: Masnavi, Majid, Nakajima, Mitsuo, Hotta, Eiki, Horioka, Kazuhiko, Niimi, Gohta, Sasaki, Akira
Format: Article
Language:English
Subjects:
70 PLASMA PHYSICS AND FUSION TECHNOLOGY
CHARGE STATES
ELECTRIC DISCHARGES
ELECTRON DENSITY
ELECTRON TEMPERATURE
EXTREME ULTRAVIOLET RADIATION
ION TEMPERATURE
LIGHT BULBS
PLASMA
PLASMA DENSITY
RADIANT HEAT TRANSFER
SPECTRA
TIN
TIN IONS
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cited_by cdi_FETCH-LOGICAL-c367t-b119e5dbcd64de519b2c39d4bfb0469b3dd10c7ff63f518f56948d68fdd2a5053
cites cdi_FETCH-LOGICAL-c367t-b119e5dbcd64de519b2c39d4bfb0469b3dd10c7ff63f518f56948d68fdd2a5053
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container_title Journal of applied physics
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creator Masnavi, Majid
Nakajima, Mitsuo
Hotta, Eiki
Horioka, Kazuhiko
Niimi, Gohta
Sasaki, Akira
description Extreme ultraviolet (EUV) discharge-based lamps for EUV lithography need to generate extremely high power in the narrow spectrum band of 13.5±0.135 nm. A simplified collisional-radiative model and radiative transfer solution for an isotropic medium were utilized to investigate the wavelength-integrated light outputs in tin (Sn) plasma. Detailed calculations using the Hebrew University-Lawrence Livermore atomic code were employed for determination of necessary atomic data of the Sn4+ to Sn13+ charge states. The result of model is compared with experimental spectra from a Sn-based discharge-produced plasma. The analysis reveals that considerably larger efficiency compared to the so-called efficiency of a black-body radiator is formed for the electron density ≃1018 cm−3. For higher electron density, the spectral efficiency of Sn plasma reduces due to the saturation of resonance transitions.
doi_str_mv 10.1063/1.2434987
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subjects 70 PLASMA PHYSICS AND FUSION TECHNOLOGY
CHARGE STATES
ELECTRIC DISCHARGES
ELECTRON DENSITY
ELECTRON TEMPERATURE
EXTREME ULTRAVIOLET RADIATION
ION TEMPERATURE
LIGHT BULBS
PLASMA
PLASMA DENSITY
RADIANT HEAT TRANSFER
SPECTRA
TIN
TIN IONS
title Estimation of optimum density and temperature for maximum efficiency of tin ions in Z discharge extreme ultraviolet sources
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