Near-surface modification of polystyrene by Ar + : Molecular dynamics simulations and experimental validation

Results are presented from molecular dynamics (MD) simulations of 100 eV Ar + bombardment of a model polystyrene (PS) surface. The simulations show that the system transitions from an initially high sputter yield (SY) for the virgin polymer to a drastically lower SY as steady state is approached. Th...

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Bibliographic Details
Published in:Applied physics letters 2007-12, Vol.91 (23), p.233113-233113-3
Main Authors: Végh, J. J., Nest, D., Graves, D. B., Bruce, R., Engelmann, S., Kwon, T., Phaneuf, R. J., Oehrlein, G. S., Long, B. K., Willson, C. G.
Format: Article
Language:English
Subjects:
70 PLASMA PHYSICS AND FUSION TECHNOLOGY
ARGON IONS
CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS
ELLIPSOMETRY
ION BEAMS
LAYERS
MOLECULAR DYNAMICS METHOD
PLASMA
POLYSTYRENE
SIMULATION
SPUTTERING
STEADY-STATE CONDITIONS
THICKNESS
X-RAY PHOTOELECTRON SPECTROSCOPY
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Summary:Results are presented from molecular dynamics (MD) simulations of 100 eV Ar + bombardment of a model polystyrene (PS) surface. The simulations show that the system transitions from an initially high sputter yield (SY) for the virgin polymer to a drastically lower SY as steady state is approached. This is consistent with corresponding ion beam experiments. The MD indicates that this drop in SY is due to the formation of a heavily cross-linked, dehydrogenated damaged layer. The thickness and structure of this layer are also consistent with ellipsometry and x-ray photoelectron spectroscopy measurements of Ar plasma-exposed PS samples.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.2821226