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Near-surface modification of polystyrene by Ar + : Molecular dynamics simulations and experimental validation
Results are presented from molecular dynamics (MD) simulations of 100 eV Ar + bombardment of a model polystyrene (PS) surface. The simulations show that the system transitions from an initially high sputter yield (SY) for the virgin polymer to a drastically lower SY as steady state is approached. Th...
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| Published in: | Applied physics letters 2007-12, Vol.91 (23), p.233113-233113-3 |
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| Main Authors: | , , , , , , , , , |
| Format: | Article |
| Language: | English |
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| cited_by | cdi_FETCH-LOGICAL-c378t-c9846b3c1f1c49140c17cc0b9b815e78abec9562f9c9b9a18d71cd45916a0153 |
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| cites | cdi_FETCH-LOGICAL-c378t-c9846b3c1f1c49140c17cc0b9b815e78abec9562f9c9b9a18d71cd45916a0153 |
| container_end_page | 233113-3 |
| container_issue | 23 |
| container_start_page | 233113 |
| container_title | Applied physics letters |
| container_volume | 91 |
| creator | Végh, J. J. Nest, D. Graves, D. B. Bruce, R. Engelmann, S. Kwon, T. Phaneuf, R. J. Oehrlein, G. S. Long, B. K. Willson, C. G. |
| description | Results are presented from molecular dynamics (MD) simulations of
100
eV
Ar
+
bombardment of a model polystyrene (PS) surface. The simulations show that the system transitions from an initially high sputter yield (SY) for the virgin polymer to a drastically lower SY as steady state is approached. This is consistent with corresponding ion beam experiments. The MD indicates that this drop in SY is due to the formation of a heavily cross-linked, dehydrogenated damaged layer. The thickness and structure of this layer are also consistent with ellipsometry and x-ray photoelectron spectroscopy measurements of Ar plasma-exposed PS samples. |
| doi_str_mv | 10.1063/1.2821226 |
| format | article |
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100
eV
Ar
+
bombardment of a model polystyrene (PS) surface. The simulations show that the system transitions from an initially high sputter yield (SY) for the virgin polymer to a drastically lower SY as steady state is approached. This is consistent with corresponding ion beam experiments. The MD indicates that this drop in SY is due to the formation of a heavily cross-linked, dehydrogenated damaged layer. The thickness and structure of this layer are also consistent with ellipsometry and x-ray photoelectron spectroscopy measurements of Ar plasma-exposed PS samples.</description><identifier>ISSN: 0003-6951</identifier><identifier>EISSN: 1077-3118</identifier><identifier>DOI: 10.1063/1.2821226</identifier><identifier>CODEN: APPLAB</identifier><language>eng</language><publisher>United States: American Institute of Physics</publisher><subject>70 PLASMA PHYSICS AND FUSION TECHNOLOGY ; ARGON IONS ; CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS ; ELLIPSOMETRY ; ION BEAMS ; LAYERS ; MOLECULAR DYNAMICS METHOD ; PLASMA ; POLYSTYRENE ; SIMULATION ; SPUTTERING ; STEADY-STATE CONDITIONS ; THICKNESS ; X-RAY PHOTOELECTRON SPECTROSCOPY</subject><ispartof>Applied physics letters, 2007-12, Vol.91 (23), p.233113-233113-3</ispartof><rights>2007 American Institute of Physics</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c378t-c9846b3c1f1c49140c17cc0b9b815e78abec9562f9c9b9a18d71cd45916a0153</citedby><cites>FETCH-LOGICAL-c378t-c9846b3c1f1c49140c17cc0b9b815e78abec9562f9c9b9a18d71cd45916a0153</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://pubs.aip.org/apl/article-lookup/doi/10.1063/1.2821226$$EHTML$$P50$$Gscitation$$H</linktohtml><link.rule.ids>230,314,780,782,784,795,885,27924,27925,76383</link.rule.ids><backlink>$$Uhttps://www.osti.gov/biblio/21016202$$D View this record in Osti.gov$$Hfree_for_read</backlink></links><search><creatorcontrib>Végh, J. J.</creatorcontrib><creatorcontrib>Nest, D.</creatorcontrib><creatorcontrib>Graves, D. B.</creatorcontrib><creatorcontrib>Bruce, R.</creatorcontrib><creatorcontrib>Engelmann, S.</creatorcontrib><creatorcontrib>Kwon, T.</creatorcontrib><creatorcontrib>Phaneuf, R. J.</creatorcontrib><creatorcontrib>Oehrlein, G. S.</creatorcontrib><creatorcontrib>Long, B. K.</creatorcontrib><creatorcontrib>Willson, C. G.</creatorcontrib><title>Near-surface modification of polystyrene by Ar + : Molecular dynamics simulations and experimental validation</title><title>Applied physics letters</title><description>Results are presented from molecular dynamics (MD) simulations of
100
eV
Ar
+
bombardment of a model polystyrene (PS) surface. The simulations show that the system transitions from an initially high sputter yield (SY) for the virgin polymer to a drastically lower SY as steady state is approached. This is consistent with corresponding ion beam experiments. The MD indicates that this drop in SY is due to the formation of a heavily cross-linked, dehydrogenated damaged layer. The thickness and structure of this layer are also consistent with ellipsometry and x-ray photoelectron spectroscopy measurements of Ar plasma-exposed PS samples.</description><subject>70 PLASMA PHYSICS AND FUSION TECHNOLOGY</subject><subject>ARGON IONS</subject><subject>CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS</subject><subject>ELLIPSOMETRY</subject><subject>ION BEAMS</subject><subject>LAYERS</subject><subject>MOLECULAR DYNAMICS METHOD</subject><subject>PLASMA</subject><subject>POLYSTYRENE</subject><subject>SIMULATION</subject><subject>SPUTTERING</subject><subject>STEADY-STATE CONDITIONS</subject><subject>THICKNESS</subject><subject>X-RAY PHOTOELECTRON SPECTROSCOPY</subject><issn>0003-6951</issn><issn>1077-3118</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2007</creationdate><recordtype>article</recordtype><recordid>eNp1kEtLxDAQgIMoWFcP_oOAJ5GumaSveBCWxResetl7SKcpRtpmSbpi_73tbq-ehpn5Zpj5CLkGtgSWiXtY8oID59kJiYDleSwAilMSMcZEnMkUzslFCN9jmnIhItJ-GO3jsPe1RkNbV9naou6t66ir6c41Q-gHbzpDy4GuPL2jD_TdNQb3jfa0GjrdWgw02HYsTGOB6q6i5ndnvG1N1-uG_ujGVofmJTmrdRPM1RwXZPv8tF2_xpvPl7f1ahOjyIs-RlkkWSkQasBEQsIQckRWyrKA1OSFLg3KNOO1RFlKDUWVA1ZJKiHTDFKxIDfHtS70VgW0vcEvdF1nsFccGGSc8ZG6PVLoXQje1Go3nqz9oICpSaYCNcsc2ccjOy07vPI_PBlVs1E1GxV_Y4d83A</recordid><startdate>20071203</startdate><enddate>20071203</enddate><creator>Végh, J. J.</creator><creator>Nest, D.</creator><creator>Graves, D. B.</creator><creator>Bruce, R.</creator><creator>Engelmann, S.</creator><creator>Kwon, T.</creator><creator>Phaneuf, R. J.</creator><creator>Oehrlein, G. S.</creator><creator>Long, B. K.</creator><creator>Willson, C. G.</creator><general>American Institute of Physics</general><scope>AAYXX</scope><scope>CITATION</scope><scope>OTOTI</scope></search><sort><creationdate>20071203</creationdate><title>Near-surface modification of polystyrene by Ar + : Molecular dynamics simulations and experimental validation</title><author>Végh, J. J. ; Nest, D. ; Graves, D. B. ; Bruce, R. ; Engelmann, S. ; Kwon, T. ; Phaneuf, R. J. ; Oehrlein, G. S. ; Long, B. K. ; Willson, C. G.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c378t-c9846b3c1f1c49140c17cc0b9b815e78abec9562f9c9b9a18d71cd45916a0153</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2007</creationdate><topic>70 PLASMA PHYSICS AND FUSION TECHNOLOGY</topic><topic>ARGON IONS</topic><topic>CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS</topic><topic>ELLIPSOMETRY</topic><topic>ION BEAMS</topic><topic>LAYERS</topic><topic>MOLECULAR DYNAMICS METHOD</topic><topic>PLASMA</topic><topic>POLYSTYRENE</topic><topic>SIMULATION</topic><topic>SPUTTERING</topic><topic>STEADY-STATE CONDITIONS</topic><topic>THICKNESS</topic><topic>X-RAY PHOTOELECTRON SPECTROSCOPY</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Végh, J. J.</creatorcontrib><creatorcontrib>Nest, D.</creatorcontrib><creatorcontrib>Graves, D. B.</creatorcontrib><creatorcontrib>Bruce, R.</creatorcontrib><creatorcontrib>Engelmann, S.</creatorcontrib><creatorcontrib>Kwon, T.</creatorcontrib><creatorcontrib>Phaneuf, R. J.</creatorcontrib><creatorcontrib>Oehrlein, G. S.</creatorcontrib><creatorcontrib>Long, B. K.</creatorcontrib><creatorcontrib>Willson, C. G.</creatorcontrib><collection>CrossRef</collection><collection>OSTI.GOV</collection><jtitle>Applied physics letters</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Végh, J. J.</au><au>Nest, D.</au><au>Graves, D. B.</au><au>Bruce, R.</au><au>Engelmann, S.</au><au>Kwon, T.</au><au>Phaneuf, R. J.</au><au>Oehrlein, G. S.</au><au>Long, B. K.</au><au>Willson, C. G.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Near-surface modification of polystyrene by Ar + : Molecular dynamics simulations and experimental validation</atitle><jtitle>Applied physics letters</jtitle><date>2007-12-03</date><risdate>2007</risdate><volume>91</volume><issue>23</issue><spage>233113</spage><epage>233113-3</epage><pages>233113-233113-3</pages><issn>0003-6951</issn><eissn>1077-3118</eissn><coden>APPLAB</coden><abstract>Results are presented from molecular dynamics (MD) simulations of
100
eV
Ar
+
bombardment of a model polystyrene (PS) surface. The simulations show that the system transitions from an initially high sputter yield (SY) for the virgin polymer to a drastically lower SY as steady state is approached. This is consistent with corresponding ion beam experiments. The MD indicates that this drop in SY is due to the formation of a heavily cross-linked, dehydrogenated damaged layer. The thickness and structure of this layer are also consistent with ellipsometry and x-ray photoelectron spectroscopy measurements of Ar plasma-exposed PS samples.</abstract><cop>United States</cop><pub>American Institute of Physics</pub><doi>10.1063/1.2821226</doi></addata></record> |
| fulltext | fulltext |
| identifier | ISSN: 0003-6951 |
| ispartof | Applied physics letters, 2007-12, Vol.91 (23), p.233113-233113-3 |
| issn | 0003-6951 1077-3118 |
| language | eng |
| recordid | cdi_osti_scitechconnect_21016202 |
| source | American Institute of Physics (AIP) Publications; American Institute of Physics:Jisc Collections:Transitional Journals Agreement 2021-23 (Reading list) |
| subjects | 70 PLASMA PHYSICS AND FUSION TECHNOLOGY ARGON IONS CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS ELLIPSOMETRY ION BEAMS LAYERS MOLECULAR DYNAMICS METHOD PLASMA POLYSTYRENE SIMULATION SPUTTERING STEADY-STATE CONDITIONS THICKNESS X-RAY PHOTOELECTRON SPECTROSCOPY |
| title | Near-surface modification of polystyrene by Ar + : Molecular dynamics simulations and experimental validation |
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