Influence of Substrate Nature and Annealing on Electro-Optical Properties of ZnO Thin Films

ZnO thin films were grown on different substrates (glass, quartz, silicon wafers, etc) by vacuum thermal evaporation. Different thermal treatments were performed in order to obtain transparent and conductive or high resistive ZnO tin films. The optical and electrical properties of ZnO thin films are...

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Bibliographic Details
Main Authors: Iacomi, Felicia, Baban, C, Iftimie, Nicoleta, Prepelita, Petronela, Luca, D
Format: Conference Proceeding
Language:English
Subjects:
ANNEALING
ELECTRIC CONDUCTIVITY
IRRADIATION
MATERIALS SCIENCE
OPACITY
QUARTZ
SEMICONDUCTOR MATERIALS
SILICON
SUBSTRATES
THIN FILMS
ULTRAVIOLET RADIATION
VACUUM COATING
ZINC OXIDES
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Summary:ZnO thin films were grown on different substrates (glass, quartz, silicon wafers, etc) by vacuum thermal evaporation. Different thermal treatments were performed in order to obtain transparent and conductive or high resistive ZnO tin films. The optical and electrical properties of ZnO thin films are dependent on the crucible temperature, annealing conditions and on the substrate nature. The thin films are transparent and have an electrical resistivity in 10-4 m regio. The annealing process performed in vacuum at 573K or under UV irradiation determines a decrease in the electrical resistivity of films.
ISSN:0094-243X
1551-7616
DOI:10.1063/1.2733132