Experimental study of Cr/Sc multilayer mirrors for the nitrogen K{sub {alpha}}-emission line

The authors present an experimental study of Cr/Sc multilayer mirrors optimized for the detection of the nitrogen K{sub {alpha}}-emission line ({lambda}=3.16 nm) at a grazing incidence around 23 deg., for electron probe microanalysis applications. The multilayers were deposited onto silicon substrat...

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Published in:Journal of vacuum science & technology. A, Vacuum, surfaces, and films Vacuum, surfaces, and films, 2008-05, Vol.26 (3)
Main Authors: Hardouin, Aurelie, Delmotte, Franck, Ravet, Marie Francoise, Bridou, Francoise, Jerome, Arnaud, Varniere, Francoise, Montcalm, Claude, Hedacq, Sebastien, Gullikson, Eric, Aubert, Pascal, Laboratoire Charles Fabry de l'Institut d'Optique, CNRS, Universite Paris-Sud, Campus Polytechnique, RD128, 91127 Palaiseau cedex, Xenocs SA, 19 rue Francois Blumet, 38360 Sassenage, Lawrence Berkeley National Laboratory, Berkeley, California 94720, Laboratoire Multicouches Nanometriques, Universite d'Evry Val d'Essonne, Batiment Maupertuis, rue du Pere Jarlan-91025 Evry cedex
Format: Article
Language:English
Subjects:
ATOMIC FORCE MICROSCOPY
COPPER
ELECTRON MICROPROBE ANALYSIS
EMISSION
LAYERS
MAGNETRONS
MATERIALS SCIENCE
MIRRORS
NITROGEN
REFLECTIVITY
STRONTIUM
SURFACE COATING
SYNCHROTRON RADIATION
X RADIATION
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Summary:The authors present an experimental study of Cr/Sc multilayer mirrors optimized for the detection of the nitrogen K{sub {alpha}}-emission line ({lambda}=3.16 nm) at a grazing incidence around 23 deg., for electron probe microanalysis applications. The multilayers were deposited onto silicon substrates using a dc magnetron sputtering system. They were characterized with grazing incidence copper K{sub {alpha}} x-ray reflectometry and atomic force microscopy, as well as with at-wavelength reflectometry using synchrotron radiation. These various characterization methods pointed out that the interfacial roughness of these multilayers increases drastically with the number of bilayers. Growth parameters were then optimized, and it is shown that the structure and reflectivity of such multilayers can be considerably improved by optimizing the sputter gas pressure during the deposition process. Reflectivity higher than 37% were measured at 22.3 deg. grazing angle for the nitrogen K{sub {alpha}}-emission line.
ISSN:0734-2101
1520-8559
DOI:10.1116/1.2891248