Structure of Nb Films Deposited by Means of Ultra-High Vacuum Cathodic Arc Technique

We report the x-ray diffraction studies of the structure of the Ultra High Vacuum Cathodic Arc (UHVCA) deposited Nb/sapphire 0001 films. An influence of deposition conditions on the resulting structure was analyzed by x-ray diffraction measurements performed for a series of samples deposited applyin...

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Bibliographic Details
Main Authors: Nietubyc, R, Pelka, J, Sadowski, M J, Strzyzewski, P
Format: Conference Proceeding
Language:English
Subjects:
CRYSTAL STRUCTURE
DEPOSITION
ELECTRIC ARCS
GRAIN ORIENTATION
MATERIALS SCIENCE
NIOBIUM
PLASMA
SAPPHIRE
X-RAY DIFFRACTION
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Summary:We report the x-ray diffraction studies of the structure of the Ultra High Vacuum Cathodic Arc (UHVCA) deposited Nb/sapphire 0001 films. An influence of deposition conditions on the resulting structure was analyzed by x-ray diffraction measurements performed for a series of samples deposited applying various ion energies. We found that obtained niobium films contain two distinct phases differing in crystallites size and orientation. For all films, the tetragonal distortion of the crystalline structure was found. An out-of-plane lattice expansion depends on the ions energy. Films show a preferred orientation of the crystalline planes.
ISSN:0094-243X
1551-7616
DOI:10.1063/1.2909164