Optimization of the size ratio of Sn sphere and laser focal spot for an extreme ultraviolet light source

The effect of the ratio of Sn sphere diameter to laser focal spot size (SD/FSS) on conversion efficiency (CE) from laser to in-band (2%) 13.5 nm extreme ultraviolet (EUV) light was investigated by fixing the laser spot size and irradiating variable diameter spheres. It was found that a minimum SD/FS...

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Bibliographic Details
Published in:Applied physics letters 2008-12, Vol.93 (22), p.221503
Main Authors: Yuspeh, S., Sequoia, K. L., Tao, Y., Tillack, M. S., Burdt, R., Najmabadi, F.
Format: Article
Language:English
Subjects:
CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS
DENSITY
EXTREME ULTRAVIOLET RADIATION
LASERS
LIGHT SOURCES
OPTIMIZATION
PHOTON EMISSION
PLASMA
PLASMA DENSITY
PLASMA PRODUCTION
SPHERES
TIN
TWO-DIMENSIONAL CALCULATIONS
X-RAY SPECTRA
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Summary:The effect of the ratio of Sn sphere diameter to laser focal spot size (SD/FSS) on conversion efficiency (CE) from laser to in-band (2%) 13.5 nm extreme ultraviolet (EUV) light was investigated by fixing the laser spot size and irradiating variable diameter spheres. It was found that a minimum SD/FSS, i.e., 2.5, is necessary to produce high in-band CE, which is 15% higher than planar targets. Two-dimensional plasma density profile maps showed that the density of the dominant in-band EUV emission region and the size of the surrounding absorbing plasma can be manipulated by geometric effects of the SD/FSS ratio.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.3036956