Loading…
Enhancement in sensitivity of copper sulfide thin film ammonia gas sensor: Effect of swift heavy ion irradiation
The studies are carried out on the effect of swift heavy ion (SHI) irradiation on surface morphology and electrical properties of copper sulfide ( Cu x S ) thin films with three different chemical compositions ( x values). The irradiation experiments have been carried out on Cu x S films with x = 1....
Saved in:
Published in: | Journal of applied physics 2009-02, Vol.105 (4), p.043701-043701-8 |
---|---|
Main Authors: | , , |
Format: | Article |
Language: | English |
Subjects: | |
Citations: | Items that this one cites Items that cite this one |
Online Access: | Get full text |
Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
Summary: | The studies are carried out on the effect of swift heavy ion (SHI) irradiation on surface morphology and electrical properties of copper sulfide
(
Cu
x
S
)
thin films with three different chemical compositions (
x
values). The irradiation experiments have been carried out on
Cu
x
S
films with
x
=
1.4
, 1.8, and 2 by 100 MeV gold heavy ions at room temperature. These as-deposited and irradiated thin films have been used to detect ammonia gas at room temperature (300 K). The SHI irradiation treatment on
x
=
1.4
and 1.8 copper sulfide films enhances the sensitivity of the gas sensor. The results are discussed considering high electronic energy deposition by 100 MeV gold heavy ions in a matrix of copper sulfide. |
---|---|
ISSN: | 0021-8979 1089-7550 |
DOI: | 10.1063/1.3053350 |