Low-temperature plasma pulsed deposition of thin films with nanoscale periodicity of properties

Film formation in low-temperature plasma in the pulsed mode was studied. The voltage’s pulse sequence in the sputtering system contained trains of short and long pulses; the short pulse time was chosen shorter than the stabilization time of the glow discharge mode. The formation of the nanoscale com...

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Published in:Semiconductors (Woodbury, N.Y.) N.Y.), 2009-06, Vol.43 (6), p.828-831
Main Authors: Serdobintsev, A. A., Veselov, A. G., Kiryasova, O. A., Portnov, S. A., Bratashov, D. N.
Format: Article
Language:English
Subjects:
DEPOSITION
Fabrication
GLOW DISCHARGES
Magnetic Materials
Magnetism
MASS SPECTROSCOPY
MATERIALS SCIENCE
NANOSTRUCTURES
PERIODICITY
PHOTOLUMINESCENCE
Physics
Physics and Astronomy
PLASMA
PULSES
SPUTTERING
Testing of Materials and Structures
THIN FILMS
Treatment
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cited_by cdi_FETCH-LOGICAL-c316t-6ce260eb33f32f94dde77699942100a7b6267639ef4fe5861703985dee4105363
cites cdi_FETCH-LOGICAL-c316t-6ce260eb33f32f94dde77699942100a7b6267639ef4fe5861703985dee4105363
container_end_page 831
container_issue 6
container_start_page 828
container_title Semiconductors (Woodbury, N.Y.)
container_volume 43
creator Serdobintsev, A. A.
Veselov, A. G.
Kiryasova, O. A.
Portnov, S. A.
Bratashov, D. N.
description Film formation in low-temperature plasma in the pulsed mode was studied. The voltage’s pulse sequence in the sputtering system contained trains of short and long pulses; the short pulse time was chosen shorter than the stabilization time of the glow discharge mode. The formation of the nanoscale composition periodicity in grown films was confirmed by secondary-ion mass spectrometry. Photoluminescence of the films synthesized in the pulsed mode was studied, as well as the possibility of controlling the luminescence behavior and intensity.
doi_str_mv 10.1134/S106378260906027X
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subjects DEPOSITION
Fabrication
GLOW DISCHARGES
Magnetic Materials
Magnetism
MASS SPECTROSCOPY
MATERIALS SCIENCE
NANOSTRUCTURES
PERIODICITY
PHOTOLUMINESCENCE
Physics
Physics and Astronomy
PLASMA
PULSES
SPUTTERING
Testing of Materials and Structures
THIN FILMS
Treatment
title Low-temperature plasma pulsed deposition of thin films with nanoscale periodicity of properties
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