Chromatic-free spatially resolved optical emission spectroscopy diagnostics for microplasma

A chromatic-free spatially resolved diagnostic system for microplasma measurement is proposed and demonstrated, which consists of an optical chromatic-free microscope mirror system, an electron multiplying charge coupled device (EMCCD), and bandpass filters. The diagnostic system free of chromatic a...

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Bibliographic Details
Published in:Review of scientific instruments 2009-02, Vol.80 (2), p.023105-023105-4
Main Authors: Zhu, Li-Guo, Chen, Wen-Cong, Zhu, Xi-Ming, Pu, Yi-Kang, Li, Ze-Ren
Format: Article
Language:English
Subjects:
ABSORPTION SPECTROSCOPY
ARGON
ATMOSPHERIC PRESSURE
CHARGE-COUPLED DEVICES
CHROMATIC ABERRATIONS
DIFFRACTION
ELECTRON TEMPERATURE
ELECTRONS
EMISSION SPECTROSCOPY
INFRARED SPECTRA
INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY
MICROSCOPES
MICROWAVE RADIATION
PLASMA DIAGNOSTICS
SPATIAL DISTRIBUTION
SPATIAL RESOLUTION
THICKNESS
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Summary:A chromatic-free spatially resolved diagnostic system for microplasma measurement is proposed and demonstrated, which consists of an optical chromatic-free microscope mirror system, an electron multiplying charge coupled device (EMCCD), and bandpass filters. The diagnostic system free of chromatic aberrations with a spatial resolution of about 6   μ m is achieved. The factors that limit the resolution of this diagnostic system have been analyzed, which are optical diffraction, the pixel size of the EMCCD, and the thickness of the microplasma. In this paper, the optimal condition for achieving a maximum resolution power has been analyzed. With this diagnostic system, we revealed the spatial nonuniformity of a microwave atmospheric-pressure argon microplasma. Furthermore, the spatial distribution of the time-averaged effective electron temperature has been estimated from the intensity distributions of 750.4 and 415.8 nm emissions.
ISSN:0034-6748
1089-7623
DOI:10.1063/1.3079379