Loading…
Chromatic-free spatially resolved optical emission spectroscopy diagnostics for microplasma
A chromatic-free spatially resolved diagnostic system for microplasma measurement is proposed and demonstrated, which consists of an optical chromatic-free microscope mirror system, an electron multiplying charge coupled device (EMCCD), and bandpass filters. The diagnostic system free of chromatic a...
Saved in:
| Published in: | Review of scientific instruments 2009-02, Vol.80 (2), p.023105-023105-4 |
|---|---|
| Main Authors: | , , , , |
| Format: | Article |
| Language: | English |
| Subjects: | |
| Citations: | Items that this one cites Items that cite this one |
| Online Access: | Get full text |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| cited_by | cdi_FETCH-LOGICAL-c366t-893d9b866359e371558a2a6541eb020969a82b9233c7cd4b545957d3e03109f83 |
|---|---|
| cites | cdi_FETCH-LOGICAL-c366t-893d9b866359e371558a2a6541eb020969a82b9233c7cd4b545957d3e03109f83 |
| container_end_page | 023105-4 |
| container_issue | 2 |
| container_start_page | 023105 |
| container_title | Review of scientific instruments |
| container_volume | 80 |
| creator | Zhu, Li-Guo Chen, Wen-Cong Zhu, Xi-Ming Pu, Yi-Kang Li, Ze-Ren |
| description | A chromatic-free spatially resolved diagnostic system for microplasma measurement is proposed and demonstrated, which consists of an optical chromatic-free microscope mirror system, an electron multiplying charge coupled device (EMCCD), and bandpass filters. The diagnostic system free of chromatic aberrations with a spatial resolution of about
6
μ
m
is achieved. The factors that limit the resolution of this diagnostic system have been analyzed, which are optical diffraction, the pixel size of the EMCCD, and the thickness of the microplasma. In this paper, the optimal condition for achieving a maximum resolution power has been analyzed. With this diagnostic system, we revealed the spatial nonuniformity of a microwave atmospheric-pressure argon microplasma. Furthermore, the spatial distribution of the time-averaged effective electron temperature has been estimated from the intensity distributions of 750.4 and 415.8 nm emissions. |
| doi_str_mv | 10.1063/1.3079379 |
| format | article |
| fullrecord | <record><control><sourceid>proquest_osti_</sourceid><recordid>TN_cdi_osti_scitechconnect_21266750</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>66990348</sourcerecordid><originalsourceid>FETCH-LOGICAL-c366t-893d9b866359e371558a2a6541eb020969a82b9233c7cd4b545957d3e03109f83</originalsourceid><addsrcrecordid>eNp1kUtLxDAUhYMoOo4u_ANSEAQXHfNoXhtBBl8w4EZXLkKapk4lbWrSEebfmzpFV95NLuTjcO45AJwhuECQkWu0IJBLwuUemCEoZM4ZJvtgBiEpcsYLcQSOY_yAaShCh-AISUwZI2IG3pbr4Fs9NCavg7VZ7NOundtmwUbvvmyV-T79apfZtomx8V1irBmCj8b326xq9HvnY0JiVvuQtY0Jvnc6tvoEHNTaRXs6vXPwen_3snzMV88PT8vbVW4IY0MuJKlkKZIfKi3hiFKhsWa0QLaEGEomtcClxIQYbqqipAWVlFfEQoKgrAWZg4ud7mhDRdMM1qyN77pkU2GEGeMUJupyR_XBf25sHFS6x1jndGf9JirGpEx5jXJXOzAdEmOwtepD0-qwVQiqMW-F1JR3Ys8n0U3Z2uqPnAJOwM0OGG2laH33v9pvFWqsQv1UQb4Bn5ePtg</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype><pqid>66990348</pqid></control><display><type>article</type><title>Chromatic-free spatially resolved optical emission spectroscopy diagnostics for microplasma</title><source>American Institute of Physics:Jisc Collections:Transitional Journals Agreement 2021-23 (Reading list)</source><source>American Institute of Physics</source><creator>Zhu, Li-Guo ; Chen, Wen-Cong ; Zhu, Xi-Ming ; Pu, Yi-Kang ; Li, Ze-Ren</creator><creatorcontrib>Zhu, Li-Guo ; Chen, Wen-Cong ; Zhu, Xi-Ming ; Pu, Yi-Kang ; Li, Ze-Ren</creatorcontrib><description>A chromatic-free spatially resolved diagnostic system for microplasma measurement is proposed and demonstrated, which consists of an optical chromatic-free microscope mirror system, an electron multiplying charge coupled device (EMCCD), and bandpass filters. The diagnostic system free of chromatic aberrations with a spatial resolution of about
6
μ
m
is achieved. The factors that limit the resolution of this diagnostic system have been analyzed, which are optical diffraction, the pixel size of the EMCCD, and the thickness of the microplasma. In this paper, the optimal condition for achieving a maximum resolution power has been analyzed. With this diagnostic system, we revealed the spatial nonuniformity of a microwave atmospheric-pressure argon microplasma. Furthermore, the spatial distribution of the time-averaged effective electron temperature has been estimated from the intensity distributions of 750.4 and 415.8 nm emissions.</description><identifier>ISSN: 0034-6748</identifier><identifier>EISSN: 1089-7623</identifier><identifier>DOI: 10.1063/1.3079379</identifier><identifier>PMID: 19256638</identifier><identifier>CODEN: RSINAK</identifier><language>eng</language><publisher>United States: American Institute of Physics</publisher><subject>ABSORPTION SPECTROSCOPY ; ARGON ; ATMOSPHERIC PRESSURE ; CHARGE-COUPLED DEVICES ; CHROMATIC ABERRATIONS ; DIFFRACTION ; ELECTRON TEMPERATURE ; ELECTRONS ; EMISSION SPECTROSCOPY ; INFRARED SPECTRA ; INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY ; MICROSCOPES ; MICROWAVE RADIATION ; PLASMA DIAGNOSTICS ; SPATIAL DISTRIBUTION ; SPATIAL RESOLUTION ; THICKNESS</subject><ispartof>Review of scientific instruments, 2009-02, Vol.80 (2), p.023105-023105-4</ispartof><rights>2009 American Institute of Physics</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c366t-893d9b866359e371558a2a6541eb020969a82b9233c7cd4b545957d3e03109f83</citedby><cites>FETCH-LOGICAL-c366t-893d9b866359e371558a2a6541eb020969a82b9233c7cd4b545957d3e03109f83</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://pubs.aip.org/rsi/article-lookup/doi/10.1063/1.3079379$$EHTML$$P50$$Gscitation$$H</linktohtml><link.rule.ids>230,314,780,782,784,795,885,27924,27925,76383</link.rule.ids><backlink>$$Uhttps://www.ncbi.nlm.nih.gov/pubmed/19256638$$D View this record in MEDLINE/PubMed$$Hfree_for_read</backlink><backlink>$$Uhttps://www.osti.gov/biblio/21266750$$D View this record in Osti.gov$$Hfree_for_read</backlink></links><search><creatorcontrib>Zhu, Li-Guo</creatorcontrib><creatorcontrib>Chen, Wen-Cong</creatorcontrib><creatorcontrib>Zhu, Xi-Ming</creatorcontrib><creatorcontrib>Pu, Yi-Kang</creatorcontrib><creatorcontrib>Li, Ze-Ren</creatorcontrib><title>Chromatic-free spatially resolved optical emission spectroscopy diagnostics for microplasma</title><title>Review of scientific instruments</title><addtitle>Rev Sci Instrum</addtitle><description>A chromatic-free spatially resolved diagnostic system for microplasma measurement is proposed and demonstrated, which consists of an optical chromatic-free microscope mirror system, an electron multiplying charge coupled device (EMCCD), and bandpass filters. The diagnostic system free of chromatic aberrations with a spatial resolution of about
6
μ
m
is achieved. The factors that limit the resolution of this diagnostic system have been analyzed, which are optical diffraction, the pixel size of the EMCCD, and the thickness of the microplasma. In this paper, the optimal condition for achieving a maximum resolution power has been analyzed. With this diagnostic system, we revealed the spatial nonuniformity of a microwave atmospheric-pressure argon microplasma. Furthermore, the spatial distribution of the time-averaged effective electron temperature has been estimated from the intensity distributions of 750.4 and 415.8 nm emissions.</description><subject>ABSORPTION SPECTROSCOPY</subject><subject>ARGON</subject><subject>ATMOSPHERIC PRESSURE</subject><subject>CHARGE-COUPLED DEVICES</subject><subject>CHROMATIC ABERRATIONS</subject><subject>DIFFRACTION</subject><subject>ELECTRON TEMPERATURE</subject><subject>ELECTRONS</subject><subject>EMISSION SPECTROSCOPY</subject><subject>INFRARED SPECTRA</subject><subject>INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY</subject><subject>MICROSCOPES</subject><subject>MICROWAVE RADIATION</subject><subject>PLASMA DIAGNOSTICS</subject><subject>SPATIAL DISTRIBUTION</subject><subject>SPATIAL RESOLUTION</subject><subject>THICKNESS</subject><issn>0034-6748</issn><issn>1089-7623</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2009</creationdate><recordtype>article</recordtype><recordid>eNp1kUtLxDAUhYMoOo4u_ANSEAQXHfNoXhtBBl8w4EZXLkKapk4lbWrSEebfmzpFV95NLuTjcO45AJwhuECQkWu0IJBLwuUemCEoZM4ZJvtgBiEpcsYLcQSOY_yAaShCh-AISUwZI2IG3pbr4Fs9NCavg7VZ7NOundtmwUbvvmyV-T79apfZtomx8V1irBmCj8b326xq9HvnY0JiVvuQtY0Jvnc6tvoEHNTaRXs6vXPwen_3snzMV88PT8vbVW4IY0MuJKlkKZIfKi3hiFKhsWa0QLaEGEomtcClxIQYbqqipAWVlFfEQoKgrAWZg4ud7mhDRdMM1qyN77pkU2GEGeMUJupyR_XBf25sHFS6x1jndGf9JirGpEx5jXJXOzAdEmOwtepD0-qwVQiqMW-F1JR3Ys8n0U3Z2uqPnAJOwM0OGG2laH33v9pvFWqsQv1UQb4Bn5ePtg</recordid><startdate>20090201</startdate><enddate>20090201</enddate><creator>Zhu, Li-Guo</creator><creator>Chen, Wen-Cong</creator><creator>Zhu, Xi-Ming</creator><creator>Pu, Yi-Kang</creator><creator>Li, Ze-Ren</creator><general>American Institute of Physics</general><scope>NPM</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7X8</scope><scope>OTOTI</scope></search><sort><creationdate>20090201</creationdate><title>Chromatic-free spatially resolved optical emission spectroscopy diagnostics for microplasma</title><author>Zhu, Li-Guo ; Chen, Wen-Cong ; Zhu, Xi-Ming ; Pu, Yi-Kang ; Li, Ze-Ren</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c366t-893d9b866359e371558a2a6541eb020969a82b9233c7cd4b545957d3e03109f83</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2009</creationdate><topic>ABSORPTION SPECTROSCOPY</topic><topic>ARGON</topic><topic>ATMOSPHERIC PRESSURE</topic><topic>CHARGE-COUPLED DEVICES</topic><topic>CHROMATIC ABERRATIONS</topic><topic>DIFFRACTION</topic><topic>ELECTRON TEMPERATURE</topic><topic>ELECTRONS</topic><topic>EMISSION SPECTROSCOPY</topic><topic>INFRARED SPECTRA</topic><topic>INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY</topic><topic>MICROSCOPES</topic><topic>MICROWAVE RADIATION</topic><topic>PLASMA DIAGNOSTICS</topic><topic>SPATIAL DISTRIBUTION</topic><topic>SPATIAL RESOLUTION</topic><topic>THICKNESS</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Zhu, Li-Guo</creatorcontrib><creatorcontrib>Chen, Wen-Cong</creatorcontrib><creatorcontrib>Zhu, Xi-Ming</creatorcontrib><creatorcontrib>Pu, Yi-Kang</creatorcontrib><creatorcontrib>Li, Ze-Ren</creatorcontrib><collection>PubMed</collection><collection>CrossRef</collection><collection>MEDLINE - Academic</collection><collection>OSTI.GOV</collection><jtitle>Review of scientific instruments</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Zhu, Li-Guo</au><au>Chen, Wen-Cong</au><au>Zhu, Xi-Ming</au><au>Pu, Yi-Kang</au><au>Li, Ze-Ren</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Chromatic-free spatially resolved optical emission spectroscopy diagnostics for microplasma</atitle><jtitle>Review of scientific instruments</jtitle><addtitle>Rev Sci Instrum</addtitle><date>2009-02-01</date><risdate>2009</risdate><volume>80</volume><issue>2</issue><spage>023105</spage><epage>023105-4</epage><pages>023105-023105-4</pages><issn>0034-6748</issn><eissn>1089-7623</eissn><coden>RSINAK</coden><abstract>A chromatic-free spatially resolved diagnostic system for microplasma measurement is proposed and demonstrated, which consists of an optical chromatic-free microscope mirror system, an electron multiplying charge coupled device (EMCCD), and bandpass filters. The diagnostic system free of chromatic aberrations with a spatial resolution of about
6
μ
m
is achieved. The factors that limit the resolution of this diagnostic system have been analyzed, which are optical diffraction, the pixel size of the EMCCD, and the thickness of the microplasma. In this paper, the optimal condition for achieving a maximum resolution power has been analyzed. With this diagnostic system, we revealed the spatial nonuniformity of a microwave atmospheric-pressure argon microplasma. Furthermore, the spatial distribution of the time-averaged effective electron temperature has been estimated from the intensity distributions of 750.4 and 415.8 nm emissions.</abstract><cop>United States</cop><pub>American Institute of Physics</pub><pmid>19256638</pmid><doi>10.1063/1.3079379</doi><tpages>1</tpages></addata></record> |
| fulltext | fulltext |
| identifier | ISSN: 0034-6748 |
| ispartof | Review of scientific instruments, 2009-02, Vol.80 (2), p.023105-023105-4 |
| issn | 0034-6748 1089-7623 |
| language | eng |
| recordid | cdi_osti_scitechconnect_21266750 |
| source | American Institute of Physics:Jisc Collections:Transitional Journals Agreement 2021-23 (Reading list); American Institute of Physics |
| subjects | ABSORPTION SPECTROSCOPY ARGON ATMOSPHERIC PRESSURE CHARGE-COUPLED DEVICES CHROMATIC ABERRATIONS DIFFRACTION ELECTRON TEMPERATURE ELECTRONS EMISSION SPECTROSCOPY INFRARED SPECTRA INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY MICROSCOPES MICROWAVE RADIATION PLASMA DIAGNOSTICS SPATIAL DISTRIBUTION SPATIAL RESOLUTION THICKNESS |
| title | Chromatic-free spatially resolved optical emission spectroscopy diagnostics for microplasma |
| url | http://sfxeu10.hosted.exlibrisgroup.com/loughborough?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2024-12-29T11%3A39%3A47IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-proquest_osti_&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=Chromatic-free%20spatially%20resolved%20optical%20emission%20spectroscopy%20diagnostics%20for%20microplasma&rft.jtitle=Review%20of%20scientific%20instruments&rft.au=Zhu,%20Li-Guo&rft.date=2009-02-01&rft.volume=80&rft.issue=2&rft.spage=023105&rft.epage=023105-4&rft.pages=023105-023105-4&rft.issn=0034-6748&rft.eissn=1089-7623&rft.coden=RSINAK&rft_id=info:doi/10.1063/1.3079379&rft_dat=%3Cproquest_osti_%3E66990348%3C/proquest_osti_%3E%3Cgrp_id%3Ecdi_FETCH-LOGICAL-c366t-893d9b866359e371558a2a6541eb020969a82b9233c7cd4b545957d3e03109f83%3C/grp_id%3E%3Coa%3E%3C/oa%3E%3Curl%3E%3C/url%3E&rft_id=info:oai/&rft_pqid=66990348&rft_id=info:pmid/19256638&rfr_iscdi=true |