Evidence of nonplanar field emission via secondary electron detection in near field emission scanning electron microscopy

Nonplanar field emission from electrochemically etched tungsten field emitters has been observed using near field emission scanning electron microscopy. Close-proximity field emission in adequate ultrahigh vacuum conditions was implemented to attain Fowler–Nordheim plots using typical imaging parame...

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Bibliographic Details
Published in:Applied physics letters 2009-04, Vol.94 (15)
Main Authors: Kirk, T. L., Scholder, O., De Pietro, L. G., Ramsperger, U., Pescia, D.
Format: Article
Language:English
Subjects:
CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS
ELECTROCHEMISTRY
ELECTRON DETECTION
FIELD EMISSION
INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY
SCANNING ELECTRON MICROSCOPY
SPATIAL RESOLUTION
SPHERICAL CONFIGURATION
TUNGSTEN
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Summary:Nonplanar field emission from electrochemically etched tungsten field emitters has been observed using near field emission scanning electron microscopy. Close-proximity field emission in adequate ultrahigh vacuum conditions was implemented to attain Fowler–Nordheim plots using typical imaging parameters. The emission radii deduced via a detailed, spherical surface field emission theory, by [Edgcombe and de Jonge, J. Phys. D 40, 4123 (2007)], reveal that our sharpest tip asperities are less than a nanometer. This yields a spatial resolution on the order of one nanometer.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.3117224