Development of a dielectric-barrier discharge enhanced microplasma jet

A low-power ultrahigh-frequency-driven inductively coupled microplasma (ICMP) source equipped with dielectric-barrier discharge (DBD) was developed to realize a low-temperature and high-density plasma in fine quartz capillaries with inner diameters of less than 1.0 mm. A stable plasma was generated...

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Bibliographic Details
Published in:Applied physics letters 2009-05, Vol.94 (19), p.191502-191502-3
Main Authors: Kiriu, Shinya, Miyazoe, Hiroyuki, Takamine, Fumitoshi, Sai, Masaki, Choi, Jai Hyuk, Tomai, Takaaki, Terashima, Kazuo
Format: Article
Language:English
Subjects:
CAPILLARIES
CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS
DIELECTRIC MATERIALS
ELECTRON DENSITY
EMISSION SPECTROSCOPY
GAS FLOW
JETS
PLASMA
PLASMA DENSITY
PLASMA JETS
QUARTZ
TEMPERATURE RANGE 0400-1000 K
TIME RESOLUTION
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Summary:A low-power ultrahigh-frequency-driven inductively coupled microplasma (ICMP) source equipped with dielectric-barrier discharge (DBD) was developed to realize a low-temperature and high-density plasma in fine quartz capillaries with inner diameters of less than 1.0 mm. A stable plasma was generated and its sustainability was independent of the gas flow rate. This plasma jet had a longer plume than that of a thermoelectron-enhanced microplasma jet, and time-resolved characterization suggested interactions between ICMP and DBD jets. By optical emission spectroscopy characterization, the gas temperature and electron density inside a capillary were estimated to be 400-1000 K and 10 13 - 10 14   cm − 3 , respectively.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.3130183