Measurement of the electron density in a subatmospheric dielectric barrier discharge by spectral line shape

The electron density in a subatmospheric dielectric barrier discharge by using argon spectral line shape is measured for the first time. With the gas pressure increasing in the range of 1 × 10 4   Pa - 6 × 10 4   Pa , the line profiles of argon 696.54 nm are measured. An asymmetrical deconvolution p...

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Bibliographic Details
Published in:Journal of applied physics 2009-07, Vol.106 (1), p.013301-013301-5
Main Authors: Dong, Lifang, Qi, Yuyan, Liu, Weiyuan, Fan, Weili
Format: Article
Language:English
Subjects:
70 PLASMA PHYSICS AND FUSION TECHNOLOGY
ARGON
DIELECTRIC MATERIALS
ELECTRIC DISCHARGES
ELECTRON DENSITY
ELECTRON TEMPERATURE
ELEMENTS
FLUIDS
GASES
ION TEMPERATURE
LINE BROADENING
MATERIALS
NONMETALS
PLASMA DENSITY
RARE GASES
STARK EFFECT
VAN DER WAALS FORCES
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Summary:The electron density in a subatmospheric dielectric barrier discharge by using argon spectral line shape is measured for the first time. With the gas pressure increasing in the range of 1 × 10 4   Pa - 6 × 10 4   Pa , the line profiles of argon 696.54 nm are measured. An asymmetrical deconvolution procedure is applied to separate the Gaussian and Lorentzian profile from the measured spectral line. The gas temperature is estimated by using rotational temperature of N 2 + . By subtracting the van der Waals broadening and partial Lorentzian instrumental broadening from the Lorentzian broadening, the Stark broadening is obtained and used to estimate the electron density. It is found that the electron density in dielectric barrier discharge increases with the increase in gas pressure.
ISSN:0021-8979
1089-7550
DOI:10.1063/1.3159891