Gated pinhole camera imaging of the high-energy ions emitted by a discharge produced Sn plasma for extreme ultraviolet generation

The origin and nature of the high-energy ions emitted by a discharge produced plasma source are studied using gated pinhole camera imaging. Time-of-flight analysis in combination with Faraday cup measurements enables characterization of the high-velocity component of the ionic debris. The use of an...

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Bibliographic Details
Published in:Journal of applied physics 2009-10, Vol.106 (8)
Main Authors: Gielissen, K., Sidelnikov, Y., Glushkov, D., Soer, W. A., Banine, V., v. d. Mullen, J. J. A. M.
Format: Article
Language:English
Subjects:
BEAM MONITORS
CATHODES
CHARGED PARTICLES
CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS
ELECTRIC DISCHARGES
ELECTRODES
ELECTROMAGNETIC RADIATION
EMISSION
ENERGY
ENERGY RANGE
EXTREME ULTRAVIOLET RADIATION
FARADAY CUPS
ION EMISSION
IONS
KEV RANGE
KEV RANGE 10-100
KINETIC ENERGY
MAGNETIC FIELDS
MEASURING INSTRUMENTS
MONITORS
OXYGEN IONS
PLASMA PRODUCTION
RADIATIONS
RESOLUTION
TIME RESOLUTION
TIME-OF-FLIGHT METHOD
TIMING PROPERTIES
TIN IONS
ULTRAVIOLET RADIATION
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Description
Summary:The origin and nature of the high-energy ions emitted by a discharge produced plasma source are studied using gated pinhole camera imaging. Time-of-flight analysis in combination with Faraday cup measurements enables characterization of the high-velocity component of the ionic debris. The use of an optional magnetic field allows mass-to-charge analysis of the first part of the Faraday cup signal. It is shown that this consists mainly of oxygen ions emitted from a region near the cathode. Time-resolved images of Sn ions with a kinetic energy of 45 keV visualize the regions in between the electrodes where the high-energy ion generation takes place.
ISSN:0021-8979
1089-7550
DOI:10.1063/1.3239994