Fabrication-tolerant 1310 nm laterally-coupled distributed feedback lasers with high side mode suppression ratios

A laterally-coupled distributed feedback (LC-DFB) laser was designed and fabricated using stepper lithography. Such DFB lasers eliminate the need of the commonly required re-growth steps in a conventional DFB laser fabrication process. With LC-DFB lasers, the grating can be lithographically patterne...

Full description

Saved in:
Bibliographic Details
Main Authors: Millett, R., Dridi, K., Benhsaien, A., Schriemer, H., Hinzer, K., Hall, T.
Format: Conference Proceeding
Language:English
Subjects:
ARSENIC COMPOUNDS
ARSENIDES
CRYSTAL GROWTH METHODS
ELECTRON MICROSCOPY
EPITAXY
FABRICATION
FEEDBACK
GALLIUM COMPOUNDS
GALLIUM PHOSPHIDES
INDIUM ARSENIDES
INDIUM COMPOUNDS
INDIUM PHOSPHIDES
LASERS
MASKING
MATERIALS SCIENCE
MICROSCOPY
PHOSPHIDES
PHOSPHORUS COMPOUNDS
PNICTIDES
RESOLUTION
SCANNING ELECTRON MICROSCOPY
TOLERANCE
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:A laterally-coupled distributed feedback (LC-DFB) laser was designed and fabricated using stepper lithography. Such DFB lasers eliminate the need of the commonly required re-growth steps in a conventional DFB laser fabrication process. With LC-DFB lasers, the grating can be lithographically patterned out of the ridge waveguide. High order gratings can enhance the lithographic tolerance for lower resolution patterning, yielding lasers more amenable to mass-manufacturing. 1310 nm InGaAsP/InP LC-DFB laser with third-order gratings was fabricated using i-line 5x stepper lithography. Excellent side mode suppression ratio over 52 dB has been measured with a single mode lasing around 1310 nm.
ISSN:0094-243X
1551-7616
DOI:10.1063/1.3521380