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The role of acceptance angle in measurements with ion energy analyzers: Study by numerical simulations
The importance of an acceptance angle in the plasma diagnostics with ion energy analyzers is investigated by means of numerical simulations. It is shown that wide acceptance angles result in low energy tails in measured ion distribution functions ( IDF x ) . For flowing plasmas or plasmas with beams...
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Published in: | Applied physics letters 2010-12, Vol.97 (26), p.261501-261501-3 |
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Main Authors: | , , , |
Format: | Article |
Language: | English |
Subjects: | |
Citations: | Items that this one cites Items that cite this one |
Online Access: | Get full text |
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Summary: | The importance of an acceptance angle in the plasma diagnostics with ion energy analyzers is investigated by means of numerical simulations. It is shown that wide acceptance angles result in low energy tails in measured ion distribution functions
(
IDF
x
)
. For flowing plasmas or plasmas with beams, the orientation of the analyzer's orifice gives different results due to bending of ion trajectories in the vicinity of the analyzer. It is demonstrated that the maximum in the
IDF
x
is at energies lower than the plasma potential. Simulations are done with
DIP3D
, a three-dimensional particle-in-cell code. |
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ISSN: | 0003-6951 1077-3118 |
DOI: | 10.1063/1.3531757 |