Influence of annular magnet on discharge characteristics in enhanced glow discharge plasma immersion ion implantation

A permanent annular magnet positioned at the grounded anode alters the discharge characteristics in enhanced glow discharge plasma immersion ion implantation (EGD-PIII). The nonuniform magnetic field increases the electron path length and confines electron motion due to the magnetic mirror effect an...

Full description

Saved in:
Bibliographic Details
Published in:Applied physics letters 2011-01, Vol.98 (2), p.021502-021502-3
Main Authors: Li, Liu He, Wang, Zhuo, Lu, Qiu Yuan, Pang, En Jing, Dun, Dan Dan, He, Fu Shun, Li, Fen, Fu, Ricky K. Y., Chu, Paul K.
Format: Article
Language:English
Subjects:
70 PLASMA PHYSICS AND FUSION TECHNOLOGY
ANODES
CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS
ELECTRIC DISCHARGES
ELECTRIC POTENTIAL
ELECTRIC PROBES
ELECTRODES
ELECTRONS
ELEMENTARY PARTICLES
FERMIONS
FLUID MECHANICS
GLOW DISCHARGES
HYDRODYNAMICS
ION DENSITY
ION IMPLANTATION
IONIZATION
LANGMUIR PROBE
LEPTONS
MAGNETIC FIELDS
MAGNETIC MIRRORS
MAGNETOHYDRODYNAMICS
MAGNETS
MECHANICS
OPEN PLASMA DEVICES
PERMANENT MAGNETS
PLASMA
PLASMA POTENTIAL
PROBES
THERMONUCLEAR DEVICES
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:A permanent annular magnet positioned at the grounded anode alters the discharge characteristics in enhanced glow discharge plasma immersion ion implantation (EGD-PIII). The nonuniform magnetic field increases the electron path length and confines electron motion due to the magnetic mirror effect and electron-neutral collisions thus occur more frequently. The plasma potential and ion density measured by a Langmuir probe corroborate that ionization is improved near the grounded anode. This hybrid magnetic field EGD-PIII method is suitable for implantation of gases with low ionization rates.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.3537962