Ionization in inductively coupled argon plasmas studied by optical emission spectroscopy

Contribution of stepwise ionization to total ionization was experimentally investigated in low-pressure inductively coupled argon plasmas. In the pressure range 3–50 mTorr, optical emission spectroscopy was employed to determine metastable fractions (metastable density relative to ground state densi...

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Bibliographic Details
Published in:Journal of applied physics 2011-01, Vol.109 (1)
Main Authors: Lee, Young-Kwang, Chung, Chin-Wook
Format: Article
Language:English
Subjects:
70 PLASMA PHYSICS AND FUSION TECHNOLOGY
ARGON
CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS
DENSITY
ELECTRIC DISCHARGES
ELEMENTS
EMISSION
EMISSION SPECTROSCOPY
ENERGY LEVELS
EXCITED STATES
FLUIDS
FORECASTING
GASES
IONIZATION
NONMETALS
PHYSICAL PROPERTIES
PLASMA
PLASMA DENSITY
PLASMA DIAGNOSTICS
PLASMA PRESSURE
PRESSURE RANGE
RARE GASES
SPECTROSCOPY
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Summary:Contribution of stepwise ionization to total ionization was experimentally investigated in low-pressure inductively coupled argon plasmas. In the pressure range 3–50 mTorr, optical emission spectroscopy was employed to determine metastable fractions (metastable density relative to ground state density) by measuring the emission intensity of selected lines. The measured metastable fractions were in good agreement with the calculation, showing a dependence on the discharge pressure. The rate of stepwise ionization was estimated from the excited level densities (measurements and model predictions) and their ionization rate coefficients. It is observed that at relatively low discharge pressures (
ISSN:0021-8979
1089-7550
DOI:10.1063/1.3530578