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Change in the surface morphology and chemical composition of some oxide crystals under UV laser irradiation
The effect of the 248-nm KrF and 355-nm YAG:Nd{sup 3+} laser radiation on the surface morphology and chemical composition of SrTiO{sub 3}, Sr{sub 2}RuO{sub 4}, PbMoO{sub 4}, LiNbO{sub 3}, Y{sub 3}Al{sub 5}O{sub 12}, and Al{sub 2}O{sub 3} crystals has been studied. A relationship between the laser en...
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Published in: | Quantum electronics (Woodbury, N.Y.) N.Y.), 2011-07, Vol.41 (7), p.619-625 |
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Main Authors: | , , , , , |
Format: | Article |
Language: | English |
Subjects: | |
Citations: | Items that cite this one |
Online Access: | Get full text |
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Summary: | The effect of the 248-nm KrF and 355-nm YAG:Nd{sup 3+} laser radiation on the surface morphology and chemical composition of SrTiO{sub 3}, Sr{sub 2}RuO{sub 4}, PbMoO{sub 4}, LiNbO{sub 3}, Y{sub 3}Al{sub 5}O{sub 12}, and Al{sub 2}O{sub 3} crystals has been studied. A relationship between the laser energy density on the sample surface and the surface roughness caused by the irradiation is determined. A technique for determining exactly the geometric surface characteristics is proposed. The effect of the surface roughness on the results of energy-dispersive X-ray (EDX) microanalysis has been investigated. A method for correcting the EDX data for samples with a rough surface has been developed. It is shown that the small variation in the composition of PbMoO{sub 4}, LiNbO{sub 3}, Y{sub 3}Al{sub 5}O{sub 12}, and Al{sub 2}O{sub 3} samples after laser irradiation can be explained by the measurement error, related to the change in the surface roughness. At the same time, the irradiation of SrTiO{sub 3} and Sr{sub 2}RuO{sub 4} crystals by a YAG:Nd laser changes the chemical composition of their surface layers. (interaction of laser radiation with matter) |
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ISSN: | 1063-7818 1468-4799 |
DOI: | 10.1070/QE2011v041n07ABEH014420 |