MOTIS: A Focused Ion Beam Source Based On Laser-Cooled Atoms

We have demonstrated high resolution focused ion beams based on a magneto-optical trap ion source (MOTIS), which takes advantage of the ultra cold temperatures of laser cooled atoms to produce high brightness, low emittance ion beams. We have created focused beams of both Cr{sup +} and Li{sup +} and...

Full description

Saved in:
Bibliographic Details
Main Authors: Knuffman, B., Steele, A. V., McClelland, J. J., Orloff, J., Maazouz, M.
Format: Conference Proceeding
Language:English
Subjects:
ATOMIC AND MOLECULAR PHYSICS
ATOMS
BEAM EMITTANCE
BEAM PRODUCTION
BEAMS
BRIGHTNESS
CHARGED PARTICLES
CHROMIUM IONS
COOLING
ELECTROMAGNETIC RADIATION
ELECTRONS
ELEMENTARY PARTICLES
ENERGY RANGE
FERMIONS
ION BEAMS
ION SOURCES
IONIZATION
IONS
KEV RANGE
LASER RADIATION
LASERS
LEPTONS
LITHIUM IONS
MAGNETO-OPTICAL EFFECTS
OPTICAL PROPERTIES
PARTICLE ACCELERATORS
PHOTOIONIZATION
PHYSICAL PROPERTIES
RADIATIONS
RADIATIVE COOLING
RESOLUTION
TRAPS
Citations: Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:We have demonstrated high resolution focused ion beams based on a magneto-optical trap ion source (MOTIS), which takes advantage of the ultra cold temperatures of laser cooled atoms to produce high brightness, low emittance ion beams. We have created focused beams of both Cr{sup +} and Li{sup +} and present secondary electron micrographs obtained with these beams, demonstrating a focal spot size as low as 27 nm at a beam energy of 2 keV. This work shows that the MOTIS can be a useful source for focused ion beams that will open new opportunities for applications in materials characterization and metrology.
ISSN:0094-243X
1551-7616
DOI:10.1063/1.3657870